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1. The surface acoustic wave velocities and electro-mechanical coupling coefficients of AlN thin films

Author

Ouyang Xu, Weixiao Zhang, and Xixin Qu

Subjects
Coupling, Electromechanical coupling coefficient, Admittance, Materials science, Acoustics, Dispersion (optics), Surface acoustic wave, Wavenumber, Acoustic wave, Phase velocity, Composite material
Abstract

Problems encountered in measuring the surface-acoustic wave (SAW) properties of layered structures are discussed. The phase-coherent method and the admittance method are used in measuring the dispersion relationship between SAW phase velocity, SAW electromechanical coupling coefficient, and h*k (h is the thickness of AlN thin films on silicon or glass and k is the SAW wavenumber). Measurements show that only the admittance method is valid in measuring the coupling coefficients of layered structures with any kind of interdigital transducers (IDTs). The phase-coherent method can work for thin-film IDTs without counterelectrodes. >

Published
2003

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