1. Optical emission spectroscopy of High Power Impulse Magnetron Sputtering (HiPIMS) of CIGS thin films
- Author
-
Zdenek Hubicka, Jiri Olejnicek, M. Kohout, Scott A. Darveau, Petra Kšírová, Stepan Kment, Martin Cada, Christopher L. Exstrom, and M. Brunclíková
- Subjects
symbols.namesake ,Materials science ,Sputtering ,Cavity magnetron ,symbols ,Analytical chemistry ,Thin film ,Sputter deposition ,High-power impulse magnetron sputtering ,Raman spectroscopy ,Spectroscopy ,Copper indium gallium selenide solar cells - Abstract
CuIn 1−x Ga x Se 2 (CIGS) thin films with x = 0, 0.28 and 1 were prepared by the sputtering of Cu, In and Ga in HiPIMS (High Power Impulse Magnetron Sputtering) or DC magnetron and subsequently selenized in an Ar+Se atmosphere. Optical emission spectroscopy (OES) was used to monitor differences in HiPIMS and DC plasma during sputtering of metallic precursors. Thin film characteristics were measured using X-ray diffraction (XRD), scanning electron microscopy (SEM), Raman spectroscopy, energy-dispersive X-ray spectroscopy (EDX) and other techniques.
- Published
- 2014
- Full Text
- View/download PDF