6 results on '"Riedel, Stefan"'
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2. ALD ZrO2 processes for BEoL device applications
3. Ultra-thin high density capacitors for advanced packaging solutions.
4. Scaling and optimization of high-density integrated Si-capacitors
5. High-density capacitors for SiP and SoC applications based on three-dimensional integrated metal-isolator-metal structures
6. Ferroelectric hafnium oxide.
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