1. Solid-state Electrochemical Stamping of Functional Metallic Nanostructures
- Author
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Keng Hsu, Nicholas X. Fang, Placid M. Ferreira, and Peter L. Schultz
- Subjects
Materials science ,Fabrication ,law ,Etching ,Fast ion conductor ,Nanotechnology ,Electrolyte ,Stamping ,Layer (electronics) ,Dissolution ,Nanoimprint lithography ,law.invention - Abstract
A new approach of directly patterning metal at nano-scale with excellent dimensional resolution and flexibility is introduced for fabrication of functional nano-structures. This technique is based on the solid-state electrochemical dissolution of a metallic substrate at its contact with a pre-patterned surface of a solid electrolyte tool, and the subsequent formation of the complimentary pattern on the metal substrate as the solid electrolyte etches through the metal layer. Our results demonstrate repeatable and high-fidelity patterning of metal structures with a wide dimension range (20 mum to 50 nm). As this process is carried out in ambient environment and does not require wet chemicals, its potential for use as a simple and yet high-throughput metal patterning technique offers a highly competitive approach to fabricating functional structures and devices such as chemical sensors and photonic devices.
- Published
- 2007
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