16 results on '"Murdoch, G."'
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2. Integration of Al2O3 Etch Stop Layer in 21nm Pitch Dual-Damascene BEOL interconnects
3. Reliability Evaluation of Semi-damascene Ru/Air-Gap interconnect with Metal Pitch down to 18 nm
4. Enabling 3-level High Aspect Ratio Supervias for 3nm nodes and below
5. First demonstration of Two Metal Level Semi-damascene Interconnects with Fully Self-aligned Vias at 18MP
6. Buried Power Rail Metal exploration towards the 1 nm Node
7. Process Integration of High Aspect Ratio Vias with a Comparison between Co and Ru Metallizations
8. Reliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps
9. Buried Power Rail Scaling and Metal Assessment for the 3 nm Node and Beyond
10. Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck
11. Toward successful integration of gap-filling ultralow-k dielectrics
12. Alternative integration of ultralow-k dielectrics by template replacement approach
13. Remote Handling in High-Power Proton Facilities.
14. Development of a New Beam Diagnostics Platform.
15. The SNS laser profile monitor design and implementation.
16. Beam dump window design for the Spallation Neutron Source.
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