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1. A controlled, mechanical method for MEMS decapsulation

Author

Tan, Hao, primary, Moyal, Efrat, additional, Yap, Huei Hao, additional, Zhao, Yu Zhe, additional, He, Ran, additional, Ma, Yin Zhe, additional, Liu, Bing Hai, additional, Chen, Chang Qing, additional, Tan, Pik Kee, additional, Lam, Jeffrey, additional, and Mai, Zhi Hong, additional

Published
2017
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