1. Micro Electrochemical Machining for Complex Internal Micro Features
- Author
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Min Ho Kwon, Do Kwan Chung, Chong Nam Chu, Bo Hyun Kim, Hong Shik Shin, and Chan Hee Jo
- Subjects
Engineering drawing ,Surface micromachining ,Machining time ,Materials science ,business.industry ,Electrode ,Pulse duration ,Optoelectronics ,Electrochemical machining ,business ,Voltage ,Pulse (physics) - Abstract
Micromachining of internal features by electrochemical machining (ECM) is investigated. By controlling pulse conditions and using a customized tool electrode, micro features were machined on the side wall of a micro hole. In micro ECM, longer pulse on-time enlarges the side gap. A reverse tapered hole and a barrel-shape hole were fabricated through pulse duration control. Micro cavity was machined by controlling the pulse duration and machining time in similar manner. A micro disk-shape electrode was used to machine microgroove inside the hole, which is similar to turning lathe process.
- Published
- 2008
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