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Next generation of multi-object spectrographs (MOS) in astronomy will use MEMS-based programmable slit masks. Large micromirror arrays with 2048 tiltable micromirrors were fabricated using bulk and surface micro-machining, and wafer level bonding for the assembly. Micromirror size is 100μm × 200 μm and they exhibit very good surface flatness. Mirror architecture as well as a large mechanical tilt angle of 25° lead to a high contrast device, in the order of 1000:1, large enough for objects and background rejection in the MOS field of view. Finally, the micromirrors could be successfully actuated before, during and after cryogenic cooling at 162K.

We have fabricated and characterized fully programmable MEMS diffraction gratings with long, low-stress, low cross-talk and optically flat micro-mirrors, which can be vertically displaced up to 0.7μm.

Next-generation infrared astronomical instrumentation for ground-based and space telescopes requires MOEMS-based programmable slit masks for multi-object spectroscopy. We made a full space evaluation of Texas Instruments DMD chips, including tests at cold temperature and in vacuum, life tests, radiations, and vibrations and shocks. These results do not reveal any show-stopper concerning its ability to meet environmental space requirements. In parallel, a 100×200µm2 micro-mirror array was successfully designed for cryogenic temperature, fabricated and tested at 92K. Large micromirror arrays of 20'000 micromirrors have also been fabricated. These tests demonstrate the full ability of this type of components for space instrumentation.

Next-generation infrared astronomical instrumentation for telescopes requires MOEMS-based programmable slit masks for multi-object spectroscopy. A large micromirror array of 20'000 micromirrors has been fabricated for cryogenic environment utilizing a dedicated assembly stage. Preliminary tests demonstrate the functionality of both the assembly system and the device.

MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated and tested, exhibiting very good surface flatness, high contrast and cryogenic operation ability.