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5. A low-cost high-performance cleanroom enclosure.

Author

Hutchins, J.B. and Martin, M.D.

Subjects
*CLEAN rooms, *LABORATORIES
Abstract

Describes the conversion of a conventional laboratory room into a cleanroom for laser microfabrication. Development of a measured class 100 environment at the surface of the optical table; Total conversion costs; Production of an inexpensive clean enclosure that delivered clean, filtered air to the fabrication point.

Published
1999
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6. GEM: performance and aging tests

Author

Cho, H.S., primary, Kadyk, J., additional, Han, S.H., additional, Hong, W.S., additional, Perez-Mendez, V., additional, Wenzel, W., additional, Pitts, K., additional, Martin, M.D., additional, and Hutchins, J.B., additional

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