1. Charge Trapping in Al2O3/ $\beta$ -Ga2O3-Based MOS Capacitors.
- Author
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Bhuiyan, Maruf A., Zhou, Hong, Jiang, Rong, Zhang, En Xia, Fleetwood, Daniel M., Ye, Peide D., and Ma, Tso-Ping
- Subjects
DIELECTRIC devices ,METAL oxide semiconductors ,CAPACITORS - Abstract
Trapping characteristics of MOS structures with $\beta $ -Ga2O3 substrates and Al2O3 gate dielectrics are evaluated via constant-voltage stress and X-ray irradiation. Traps that affect bias-induced charging are located primarily in the Al2O3 dielectric layer, and are distributed broadly in time and/or energy. Stress-induced flatband voltage shifts are reduced by N2 annealing. Trap-assisted tunneling is shown to be responsible for the observed gate leakage. Hole trapping in the Al2O3 dielectric layer dominates device radiation response. The relatively modest radiation-induced charge trapping observed in these devices is promising for the potential future use of Al2O3/ $\beta $ -Ga2O3 devices in a space environment. [ABSTRACT FROM AUTHOR]
- Published
- 2018
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