Author: "Loktev M" / Publisher: ieee - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Loktev M"' showing total 3 results

Start Over Author "Loktev M" Publisher ieee

3 results on '"Loktev M"'

1. Integrated heat management in the reticle masking module on the LITEQ 500 projection stepper

Author: Loktev, M. Y., primary, de Boeij, J., additional, Misat, S. I., additional, and van der Stam, M. A. J., additional
Published: 2023
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2. IC-compatible optical sensor for adaptive optics

Author: de Lima Monteiro, D.W., primary, Vdovin, G., additional, and Loktev, M., additional
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3. IC-compatible optical sensor for adaptive optics.

Author: de Lima Monteiro, D.W., Vdovin, G., and Loktev, M.
Published: 2001
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