1. Transparent conducting amorphous CdO-Ga2O3 films synthesized by room temperature sputtering
- Author
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Wladek Walukiewicz, M. Kamruzzaman, Chao Ping Liu, Juan Antonio Zapien, Yishu Foo, Chun Yuen Ho, Kin Man Yu, and Weiwei Gao
- Subjects
Materials science ,business.industry ,Band gap ,Alloy ,Analytical chemistry ,chemistry.chemical_element ,Substrate (electronics) ,engineering.material ,Amorphous solid ,chemistry ,Sputtering ,Electrical resistivity and conductivity ,engineering ,Optoelectronics ,Gallium ,business ,Transparent conducting film - Abstract
CdO-Ga 2 O 3 alloy films (Cd 1-x Ga x O 1+δ ) over the whole composition range (x=0 to 1) were synthesized by room temperature radio frequency magnetron sputtering. We found that the intrinsic band gap of these alloys can be tuned in a wide range from 2.2 to 4.8 eV. As the Ga content increases to x>0.3 the alloy becomes entirely amorphous and the resistivity increases from 10−3 to 10−1 ohm-cm while the mobility decreases gradually from 15 (x=0.34) to 10 cm2/Vs (x=0.6). The resistivity of amorphous Cd 1-x Ga x O 1+δ films can be further controlled from 10−3 to 102 ohm-cm by oxygen doping. Moreover, alloy films grown on plastic (PEN) substrate exhibit similar electrical and optical properties. These results suggest that amorphous Cd 1-x Ga x O 1+δ alloy films can potentially be used as highly conducting transparent conductors on flexible solar cells as well as gate electrodes with a wide bandgap tunabilty for transparent/flexible devices.
- Published
- 2016
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