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2. A new defect distribution metrology with a consistent discrete exponential formula and its...

Author

Sato, Hisato and Ikota, Masami

Subjects
*SEMICONDUCTOR wafers, *INTEGRATED circuits, *EXPONENTIAL functions
Abstract

Proposes a discrete exponential distribution function that accurately describes a defect count distribution on semiconductor wafers and chips. Near defect-free conditions; Gamma probability density function; Negative binomial yield formula.

Published
1999
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