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Your search keyword '"Holzwarth, C. W."' showing total 6 results
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6 results on '"Holzwarth, C. W."'

4. Photonic integration in a commercial scaled bulk-CMOS process

Author

Orcutt, J. S., primary, Khilo, A., additional, Popovic, M. A., additional, Holzwarth, C. W., additional, Li, H., additional, Sun, J., additional, Mos, B., additional, Dahlem, M. S., additional, Ippen, E. P., additional, Hoyt, J. L., additional, Stojanovic, V., additional, Kartner, F. X., additional, Smith, H. I., additional, and Ram, R. J., additional

Published
2009
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6. Phase-Shift Bragg Grating in Silicon Using Equivalent Phase-Shift Method.

Author

Jie Sun, Holzwarth, C. W., and Smith, H. I.

Abstract

The design, fabrication, and measurement of a phase-shift Bragg grating in silicon using the equivalent phase-shift method are presented. Fabrication constrains are largely relaxed with this method, compared to that with conventional phase-shift structure using electron-beam lithography, enabling the fabrication of high-precision phase-shift gratings with low-cost lithography. We fabricated an equivalent phase-shift Bragg grating in silicon with optical-contact-lithography and interference lithography. The transmission spectrum shows that an equivalent quarter-wave phase-shift is achieved. [ABSTRACT FROM PUBLISHER]

Published
2012
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