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This paper introduces a first order incremental sigma-delta modulator for a 2-stage ADC and targets the use in image sensors. We applied a “Digitally Implemented Feed-Forward” (DIFF) technique and refined it with an assumption that the input signal is constant during the conversion. The modulator is fabricated in a test chip with extended counting SAR ADC. Experimental results show a linearity of |DNL| < 1 with 12-bit output code, which indicates that our design achieves 12-bit linearity without code error.

Millimeter-Wave transceivers with beamforming capabilities, such as the one presented in this work, are a key technology to reach 4 or 6Gb/s at 10m range with the IEEE 802.11ad standard. Moreover, for mm-Wave access in 5G it will also be necessary to boost peak data-rates far beyond 1Gb/s at hundreds of meters in small cells. Transceiver architectures with beamforming often combine superheterodyne with RF beamforming [1], leading to a high power consumption and a suboptimal RX noise figure due to losses in the beamforming circuitry. In contrast, the 57-to-66GHz TRX IC presented in this paper, whose architecture is depicted in Fig. 13.5.1, uses direct conversion and analog baseband beamforming. Direct-conversion radios are inherently simpler than superheterodyne and do not have to cope with the image frequency, but on the other hand they may suffer from pulling of the PA on the VCO. In this work this is avoided by the non-integer ratio of 2.5 between the operating frequency and the 24GHz PLL that subharmonically injection locks a 60GHz quadrature oscillator (Fig. 13.5.2).

This study presents a c-C4F8 based chamber cleaning chemistry as an opportunity that has both process and ESH benefits with minimal cost and process modifications. c-C4F 8 was identified based on a balanced approach. The benefits of c-C4F8 compared to the C3F8 cleaning process were estimated to justify this work. Several factors related to cost and SHE were evaluated. Some issues pertaining to the cleaning gas delivery were considered. Previously optimized c-C 4F8 recipes were used to minimize the c-C4 F8 recipe development work. FTIR and optical emission endpoint detector were used to verify the completion of chamber cleaning, and the reductions in PFC emissions. The results indicated that the c-C4F8 cleaning process reduced PFC emission by 57%, compared to our current C3F8 cleaning process. Reduced gas consumption also enabled 20% cost saving on cleaning gas. This work demonstrated a low cost and low effort approach to reduce PFC emissions in installed-base tools