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1. Variable MEMS Capacitors Implemented Into RF Filter Systems.

Author

Borwick III, Robert L., Stupar, Philip A., DeNatale, Jeffrey F., Anderson, Robert, and Erlandson, Robert

Subjects
MICROELECTROMECHANICAL systems, CAPACITORS
Abstract

Reports on the design and fabrication of a microelectromechanical systems (MEMS) analog tunable capacitor for implementation into a two-pole ultrahigh frequency filter. Advantages of the MEMS tunable capacitor over conventional varactor-based filters; Specifications that must be met by tunable capacitors.

Published
2003
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