1. The influence of electrodes on the reliability to PZT thin film
- Author
-
Paik-Kyun Shin, Byoung-Soo Lee, Jae-Ho Yuk, Duck-Chool Lee, Seung-Hyun Kim, and Bok-Hee Lee
- Subjects
Materials science ,Diffusion barrier ,Ferroelectric ceramics ,chemistry.chemical_element ,Ferroelectricity ,law.invention ,chemistry ,law ,Electrode ,Electronic engineering ,Thin film ,Composite material ,Spark plug ,Tin ,Layer (electronics) - Abstract
The effect of the Pt electrode and the Pt-IrO/sub 2/ hybrid electrode on the performance of ferroelectric device was investigated. The modified Pt thin films with non-columnar structure significantly reduced the oxidation of TiN diffusion barrier layer, which rendered it possible to incorporate the simple stacked structure of Pt/TiN/poly-Si plug. When a Pt-IrO/sub 2/ hybrid electrode is applied, PZT thin film properties are influenced by the thickness and the partial coverage of the electrode layers. The optimized Pt-IrO/sub 2/ hybrid electrode significantly enhanced the fatigue properties with minimal leakage current.
- Published
- 2004