1. The Effect of Cathodic Arc Guiding Magnetic Field on the Growth of (Ti0.36Al0.64)N Coatings
- Author
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Ana B. B. Chaar, Bilal Syed, Tun-Wei Hsu, Mats Johansson-Jöesaar, Jon M. Andersson, Gérard Henrion, Lars J. S. Johnson, Frank Mücklich, Magnus Odén, Department of Physics, Chemistry and Biology [Linköping] (IFM), Linköping University (LIU), Saarland University [Saarbrücken], Seco Tools AB (Seco Tools AB), Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), and Sandvik Coromant R&D
- Subjects
grain size ,[SPI.PLASMA]Engineering Sciences [physics]/Plasmas ,magnetic field ,coatings ,equipment and supplies ,Condensed Matter Physics ,[SPI.MAT]Engineering Sciences [physics]/Materials ,optical emission spectroscopy ,lcsh:TA1-2040 ,[PHYS.PHYS.PHYS-PLASM-PH]Physics [physics]/Physics [physics]/Plasma Physics [physics.plasm-ph] ,lcsh:Engineering (General). Civil engineering (General) ,Den kondenserade materiens fysik ,physical vapor deposition - Abstract
We use a modified cathodic arc deposition technique, including an electromagnetic coil that introduces a magnetic field in the vicinity of the source, to study its influence on the growth of (Ti0.36Al0.64)N coatings. By increasing the strength of the magnetic field produced by the coil, the cathode arc spots are steered toward the edge of the cathode, and the electrons are guided to an annular anode surrounding the cathode. As a result, the plasma density between the cathode and substrate decreased, which was observed as a lateral spread of the plasma plume, and a reduction of the deposition rate. Optical emission spectroscopy shows reduced intensities of all recorded plasma species when the magnetic field is increased due to a lower number of collisions resulting in excitation. We note a charge-to-mass ratio decrease of 12% when the magnetic field is increased, which is likely caused by a reduced degree of gas phase ionization, mainly through a decrease in N2 ionization. (Ti0.36Al0.64)N coatings grown at different plasma densities show considerable variations in grain size and phase composition. Two growth modes were identified, resulting in coatings with (i) a fine-grained glassy cubic and wurtzite phase mixture when deposited with a weak magnetic field, and (ii) a coarse-grained columnar cubic phase with a strong magnetic field. The latter conditions result in lower energy flux to the coating’s growth front, which suppresses surface diffusion and favors the formation of c-(Ti,Al)N solid solutions over phase segregated c-TiN and w-AlN. Funding agencies: Swedish Research CouncilSwedish Research Council [621-2012-4401]; Swedish government strategic research area grant AFM-SFO MatLiU [2009-00971]; VINNOVA FunMat-IIVinnova [2016-05156]
- Published
- 2019
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