1. Lead-Zirconate-Titanate Thick Films by Electrophoretic Deposition for High-Frequency Ultrasound Transducers
- Author
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Marc Lethiecq, Marija Kosec, Franck Levassort, Danjela Kuscer, Andre-Pierre Abellard, GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) (GREMAN - UMR 7347), Université de Tours-Institut National des Sciences Appliquées - Centre Val de Loire (INSA CVL), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), Institut National des Sciences Appliquées - Centre Val de Loire (INSA CVL), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université de Tours (UT)-Centre National de la Recherche Scientifique (CNRS), GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) ( GREMAN - UMR 7347 ), Université de Tours-Institut National des Sciences Appliquées - Centre Val de Loire ( INSA CVL ), and Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Centre National de la Recherche Scientifique ( CNRS )
- Subjects
Materials science ,Fabrication ,Composite number ,02 engineering and technology ,Substrate (electronics) ,Dielectric ,Lead zirconate titanate ,01 natural sciences ,Electrophoretic deposition ,chemistry.chemical_compound ,[ SPI.NRJ ] Engineering Sciences [physics]/Electric power ,0103 physical sciences ,Materials Chemistry ,Composite material ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,Porosity ,ComputingMilieux_MISCELLANEOUS ,[ PHYS.MECA.ACOU ] Physics [physics]/Mechanics [physics]/Acoustics [physics.class-ph] ,010302 applied physics ,[SPI.NRJ]Engineering Sciences [physics]/Electric power ,021001 nanoscience & nanotechnology ,Piezoelectricity ,[PHYS.MECA.ACOU]Physics [physics]/Mechanics [physics]/Acoustics [physics.class-ph] ,chemistry ,Ceramics and Composites ,[ SPI.NANO ] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,[No keyword] ,0210 nano-technology - Abstract
International audience; Lead–zirconate–titanate (PZT) thick films for high‐frequency ultrasound applications were fabricated using an electrophoretic deposition (EPD) process. The PZT powder was synthesized from constituent oxides at close‐to‐room temperature by mechanochemical activation followed by calcination at 700°C. Homogeneous PZT thick films with a thickness of ~30 μm and a density of ~80% were produced from ethanol‐based colloidal suspensions containing PZT and PbO particles that were deposited using a constant‐current mode on a platinized alumina substrate and were sintered in the presence of a liquid phase at temperatures compatible with thick‐film technology. The dielectric, mechanical, and piezoelectric parameters of the PZT thick films with a porosity of ~20% were measured and a thickness‐coupling factor of 48% was obtained. Considering that a PZT thick film is a composite structure consisting of PZT and pores, there are several methods that can be applied to calculate the effective parameters where the composite is considered as a piezoelectric homogeneous material. For this study, a matrix method based on a generalization of 2‐2 connectivity was used to deduce the parameters of a completely dense configuration. Our results confirmed that the EPD process is suitable for the fabrication of efficient, high‐frequency transducers operating at frequencies above 40 MHz.
- Published
- 2012