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38 results on '"Margueron, Samuel"'

1. High‐Frequency Surface Acoustic Wave Devices Based on Epitaxial LiNbO3 Layers on Sapphire

Author

Almirall, Anthony, Oliveri, Stefania, Baron, Thomas, Daniau, William, Margueron, Samuel, Clairet, Alexandre, Salut, Roland, Ballandras, Sylvain, Chamaly, Stéphane, Bartasyte, Ausrine, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Frec'n'sys SASU (Frec'n'sys SASU), Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), and Qualcomm France RFFE SARL (Qualcomm France )

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2019

2. Epitaxial 33°Y-oriented LiNbO3 films for Silicon Technology

Author

Bartasyte, Ausrine, S, Oliveri, Margueron, Samuel, Bachelet, Romain, Saint-Girons, Guillaume, Albertini, David, Gautier, Brice, A, Borzi, Pierre, F., Reinhardt, Alexandre, M, Bousquet, E, Blanquet, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), INL - Hétéroepitaxie et Nanostructures (INL - H&N), Institut des Nanotechnologies de Lyon (INL), Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-École Centrale de Lyon (ECL), Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE), INL - Plateforme Technologique Nanolyon (INL - Nanolyon), INL - Dispositifs Electroniques (INL - DE), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Saint-Girons, Guillaume, Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), École Centrale de Lyon (ECL), Université de Lyon-Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École Supérieure de Chimie Physique Électronique de Lyon (CPE)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-École Centrale de Lyon (ECL), and Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], [PHYS.COND.CM-MS] Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2019

3. Effect of LiNbO3 Polarity on the Structural, Optical and Acoustic Properties of Epitaxial ZnO and Mg X Zn1-x O Films

Author

Kuprenaite, Sabina, Margueron, Samuel, Millon, Cyril, Baron, Thomas, Daniau, William, Ballandras, Sylvain, Gautier, Brice, Albertini, David, Boulet, Pascal, Bartasyte, Ausrine, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Frec'n'sys SASU (Frec'n'sys SASU), Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), Institut des Nanotechnologies de Lyon (INL), Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-École Centrale de Lyon (ECL), Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE), Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), and Femto-st, Temps-fréquence

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other, [SPI.OTHER] Engineering Sciences [physics]/Other, ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2019

4. Epitaxial 33°Y-Oriented LiNbO3 Films for Silicon Technology

Author

Bartasyte, Ausrine, Oliveri, Stefania, Margueron, Samuel, Bachelet, Romain, Saint-Girons, Guillaume, Albertini, David, Gautier, Brice, Borzi, Aurelio, François, Pierre, Bousquet, Marie, Reinhardt, Alexandre, Boulet, Pascal, Blanquet, Elisabeth, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Institut des Nanotechnologies de Lyon (INL), École Centrale de Lyon (ECL), Université de Lyon-Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Institut Jean Lamour (IJL), and Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other, ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2019

5. Relationship Processing–Composition–Structure–Resistivity of LaNiO3 Thin Films Grown by Chemical Vapor Deposition_Methods

Author

Kuprenaite, Sabina, Astié, Vincent, Margueron, Samuel, Millon, Cyril, Decams, Jean, Saltyte, Zita, Plausinaitiene, Valentina, Abrutis, Adulfas, Bartasyte, Ausrine, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and Annealsys (Annealsys)

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other, ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2019

6. Epitaxial ZnO films on LiNbO3 substrates for surface acoustic wave applications

Author

Kuprenaite, Sabina, Margueron, Samuel, Millon, Cyril, Arapan, Lilia, Boulet, Pascal, Bartasyte, Ausrine, Femto-st, MN2S, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Institut Jean Lamour (IJL), and Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], [SPI.OTHER]Engineering Sciences [physics]/Other, [SPI.ACOU] Engineering Sciences [physics]/Acoustics [physics.class-ph], [SPI.OTHER] Engineering Sciences [physics]/Other, [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.MAT] Engineering Sciences [physics]/Materials, ComputingMilieux_MISCELLANEOUS, [SPI.MAT]Engineering Sciences [physics]/Materials
Abstract

International audience

Published
2019

7. Vibrational modes and overlap matrix of LiNb1−xTaxO3 mixed crystals

Author

Bartasyte, Ausrine, Margueron, Samuel, Glazer, A, Simon, E, Gregora, I, Huband, Steven, Thomas, P, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and University of Oxford [Oxford]

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other
Abstract

International audience; The wave numbers and efficiencies of the first-order lattice vibrational modes of the isomorphous solid solutions of LiNbO3−LiTaO3 have been studied by Raman and infrared spectroscopies. The substitution of niobium by tantalum induces a continuous shift of wave numbers and intensities of phonon modes indicating a one-phonon behavior. In general, the wave numbers of vibrations at low frequencies (

Published
2019

8. Towards stoichiometric LiNbO3 epitaxial thin films grown by Direct Liquid Injection MOCVD

Author

Astié, Vincent, Oliveri, Stefania, Millon, Cyril, Margueron, Samuel, Raschetti, Marina, Decams, Jean, Boulet, Pascal, Bartasyte, Ausrine, Femto-st, Temps-fréquence, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Annealsys (Annealsys), Institut Jean Lamour (IJL), and Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other, [SPI.OTHER] Engineering Sciences [physics]/Other, ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2019

9. Piezoelectric and pyroelectric energyharvesting from lithium niobate films

Author

Clementi, Giacomo, Margueron, Samuel, Suarez, Miguel Angel, Baron, Thomas, Dulmet, Bernard, Bartasyte, Ausrine, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
Abstract

International audience; In this paper we present the first implementation of lead-free Lithium Niobate as piezoelectric transducer for energy harvesting applications. The fabrication process of cantilever beams and square chips is explained. The two different types of samples have been characterized with different techniques in order to investigate vibrational harvesting and pyroelectric effect. The first tests show promising results for the application of Lithium Niobate in hybrid energy harvesting field.

Published
2018

10. Supercontinuum generation in a normally-dispersive liquid-core optical fiber using picosecond visible pulses

Author

Fanjoux, Gil, Margueron, Samuel, Beugnot, Jean, Sylvestre, Thibaut, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2018

11. Engineering of LiNbO3 thin films for next generation acoustic and optical applications

Author

Bartasyte, Ausrine, Oliveri, Stefania, Astié, Vincent, Baron, Thomas, Margueron, Samuel, Dulmet, Bernard, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other
Abstract

International audience; Présentation invitéeEMRS fall meeting, September 2018, Warsaw, Poland

Published
2018

12. Low-loss rutile TiO2 films for nanophotonics applications

Author

Kuprenaite, Sabina, Margueron, Samuel, Millon, Cyril, Raddenzati, David, Bartasyte, Ausrine, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other, Condensed Matter::Materials Science, Physics::Optics
Abstract

International audience; Titanium dioxide is a promising material for integrated photonics that is considered to be ideal for applications in nonlinear optics due to its high nonlinear refractive index (30 times that of silica) matched with large transparency (for λ > 400 nm). Its high linear refractive index (2.4–2.8) enables dense on-chip integration of nanophotonic waveguides and high confinement, that produces effective nonlinearities (100,000 times that of standard silica fiber). Integrated photonic devices require high-quality films to reduce optical losses. Therefore, the structural and compositional defect concentrations were optimized to ameliorate optical quality of TiO2 films and the films with low losses were attained. Using 3D high-temperature masks and deep UV/e-beam lithography, the films were structured to fabricate waveguides with micron size features. Compact optical circuits were fabricated in the thin film/substrate heterostructures with very high refraction index contrast.

Published
2018

13. From Green Piezoelectric Materials toDesigned Hybrid Piezoelectric Energy Harvesters

Author

Bartasyte, Ausrine, Rakotondrabe, Micky, Clementi, Giacomo, Oliveri, Stefania, Astié, Vincent, Kuprenaite, Sabina, Margueron, Samuel, Dulmet, Bernard, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other, [INFO.INFO-DS]Computer Science [cs]/Data Structures and Algorithms [cs.DS], ComputingMilieux_MISCELLANEOUS, [SPI.AUTO]Engineering Sciences [physics]/Automatic
Abstract

International audience

Published
2018

14. Energy Harvesting with lead free LiNbO3

Author

Clementi, Giacomo, Bartasyte, Ausrine, Dulmet, Bernard, Margueron, Samuel, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other
Abstract

International audience; &nbsp

Published
2018

15. High‐Frequency Surface Acoustic Wave Devices Based on Epitaxial LiNbO3 Layers on Sapphire

Author

Almirall, Anthony, Oliveri, Stefania, Astie, Vincent, Baron, Thomas, Daniau, William, Margueron, Samuel, Clairet, Alexandre, Salut, Roland, Ballandras, Sylvain, Chamaly, Stéphane, Bartasyte, Ausrine, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Frec'n'sys SASU (Frec'n'sys SASU), Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2018

16. Towards stoichiometric LiNbO3 epitaxial thin films grown by DLI-MOCVD

Author

Astié, Vincent, Oliveri, Stefania, Millon, Cyril, Margueron, Samuel, Rachetti, Marina, Decams, Jean, Boulet, Pascal, Bartasyte, Ausrine, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and Annealsys (Annealsys)

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other
Abstract

International audience; Lithium Niobate (LiNbO3 or LN) is a ferroelectric compound that presents remarkable electro-optical, acoustical, pyroelectrical and ferroelectrical properties. As such, it was extensively studied and for a large variety of potential applications such as waveguides1, high frequency filters (RF)2 and ferroelectric memory (FRAM). However, this material in the form of thin films of controlled stoichiometry is still not available in industry. Direct liquid injection metalorganic chemical vapor deposition technique (DLI-MOCVD) was used to grow epitaxial LiNbO3thin films on various substrates using tetramethylheptanedionate precursors, Li(thd) and Nb(thd)4. Epitaxial relationships are presented, and structural properties of the deposited films are investigated using X-ray diffraction (XRD) and scanning electron microscope (SEM) techniques.As lithium non-stoichiometry in LiNbO3 films is a critical parameter defining high acoustical/optical performance, lithium incorporation in the films was studied in details by varying deposition conditions. Li concentration in the films was estimated by means of Raman spectroscopy.

Published
2018

17. LiNbO3 thin films for high-temperature vibrational/thermal energy harvesters

Author

Bartasyte, Ausrine, Clementi, Giacomo, Oliveri, Stefania, Astié, Vincent, Kuprenaite, Sabina, Margueron, Samuel, Rakotondrabe, Micky, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other, [INFO.INFO-DS]Computer Science [cs]/Data Structures and Algorithms [cs.DS], ComputingMilieux_MISCELLANEOUS, [SPI.AUTO]Engineering Sciences [physics]/Automatic
Abstract

International audience

Published
2018

18. Effect of LiNbO3 polarity on the structural, optical and acoustic properties of epitaxial ZnO and Mg x Zn1−x 0 films

Author

Kuprenaite, Sabina, Margueron, Samuel, Raschetti, Marina, Millon, Cyril, Baron, Thomas, Daniau, William, Ballandras, Sylvain, Gautier, Brice, Albertini, David, Boulet, Pascal, Bartasyte, Ausrine, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and Frec|N|Sys (Frec|N|Sys)

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other, Condensed Matter::Materials Science, Physics::Optics
Abstract

International audience; The effect of LiNbO3 substrate polarization on a charge density at the interface with epitaxial ZnO and MgxZn1−x O films was studied in comparison with ZnO films on dielectric sapphire substrates. An excitonic emission and optical properties such as band gap energy, refraction index, absorption and reflectivity of the ZnO/LiNbO3 structures were studied. The effect of interface charges on the performance of surface acoustic waves with frequency of 2.7 GHz was investigated, as well. The stimulated cavity mode emission was observed due to attained quasi-phase matching conditions for thin ZnO films on sapphire at high laser excitation power. The positive polarization of the ferroelectric substrate induced the band bending of the semiconductor layer, resulting in the accumulation of the negative charges at the ferroelectric/semiconductor interface, which induced an increased reflectivity, a generation of oxygen emission lines in PL spectra under laser excitation, and an increased electromechanical coupling of surface acoustic waves. The negative polarization of the substrate increased atomic peening during sputtering deposition, which induced deteriorated quality of texture and in-plane orientation and increased the residual stresses in ZnO and MgxZn1−x O films.

Published
2018

19. Génération de supercontinuum dans une fibre optique capillaire remplie de Toluène

Author

Fanjoux, Gil, Margueron, Samuel, Beugnot, Jean, Sylvestre, Thibaut, Sylvestre, Thibaut, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), and Université de Lorraine (UL)-CentraleSupélec

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other, [SPI]Engineering Sciences [physics], [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], [SPI.OPTI] Engineering Sciences [physics]/Optics / Photonic, [SPI] Engineering Sciences [physics], [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2018

20. Epitaxial lift-off and 3D structuring of Rutile TiO2 films

Author

Kuprenaite, Sabina, Griesse-Nascimento, Sarah Emily, Margueron, Samuel, Millon, Cyril, Raddenzati, David, Mazur, E, Bartasyte, Ausrine, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS), and Harvard University [Cambridge]

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other
Abstract

International audience; Titanium oxide is a promising material for integrated photonics that is considered to be ideal for applications in nonlinear optics due to its high refractive index matched with large transparency (for λ &gt 400 nm). Integrated photonic devices require high quality films to reduce optical losses [1]. Therefore, we have deposited epitaxial (00l) oriented rutile TiO2 films on M-Sapphire (101 ̅0) to diminish the defect density. To enable epitaxial lift-off, zinc oxide was used as a sacrificial layer because of epitaxial growth possibility and simple chemical etching. Using 3D high-temperature masks and deep UV lithography, the films were structured to fabricate waveguides with micron size features. Furthermore, we have demonstrated the developed layer transfer technique that allowed the transfer of epitaxial rutile films on SiO2/Si substrates. In this work we present epitaxial lift-off and 3D structuring techniques that can be used to obtain scalable, cheap and simple rutile TiO2 based structures to be applied in nonlinear optics.

Published
2017

21. LiNbO3 Films for High-Frequency Acoustic Wave Applications

Author

Margueron, Samuel, Oliveri, Stefania, Baron, Thomas, Bartasyte, Ausrine, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other
Abstract

International audience

Published
2017

22. Influence of plasma treatments and Sn incorporation on Ga2O3 properties

Author

Maertens, Alban, Margueron, Samuel, Genty, Frédéric, Abrutis, Adulfas, Belmonte, Thierry, Boulet, Pascal, Ghanbaja, Jaafar, Talbi, Abdelkrim, Bartasyte, Ausrine, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Department of General and Inorganic Chemistry, Vilnius University [Vilnius], Institut Jean Lamour (IJL), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)

Subjects
ComputingMilieux_MISCELLANEOUS, [SPI.MAT]Engineering Sciences [physics]/Materials
Abstract

International audience

Published
2016

23. Epitaxy, optical and acoustical properties of X-, Y-, and Z-axis oriented LiNbO3 thin films grown on sapphire substrates

Author

Oliveri, Stefania, Bartasyte, Ausrine, Baron, Thomas, Salut, Roland, Margueron, Samuel, Daniau, William, Ballandras, Sylvain, Boulet, Pascal, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Frec'n'sys SASU (Frec'n'sys SASU), Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), Institut Jean Lamour (IJL), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), and Femto-st, Temps-fréquence

Subjects
[PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics], [SPI.OTHER]Engineering Sciences [physics]/Other, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], [SPI.OTHER] Engineering Sciences [physics]/Other, ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2016

24. Residual stresses in X-, Y-, and Z-axis oriented LiNbO3 thin films on sapphire substrates

Author

Oliveri, Stefania, Bartasyte, Ausrine, Baron, Thomas, Salut, Roland, Margueron, Samuel, Daniau, William, Ballandras, Sylvain, Boulet, Pascal, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Frec'n'sys SASU (Frec'n'sys SASU), Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), Institut Jean Lamour (IJL), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), and Femto-st, Temps-fréquence

Subjects
[PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics], [SPI.OTHER]Engineering Sciences [physics]/Other, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], [SPI.OTHER] Engineering Sciences [physics]/Other
Abstract

International audience; LiNbO3 (LN) single crystals are highly applied in acoustical, pyroelectric, acousto-optic, electro-optic, and non-linear optical devices [1]. LN thin films are attracting interest due to possibility to miniaturize, to integrate and to ameliorate the performance of these devices. Optical and surface acoustic wave (SAW) devices require the LN films with single crystallographic out-of-plane and in-plane orientations. The epitaxial growth of X-, Y- and Z-oriented films on sapphire substrates was already reported in literature. However, these LN films usually contained growth domains with different in-plane orientations. Moreover, little is known about the residual stresses and their relaxation mechanisms including twinning in these films. In this work, the epitaxial growth of X-, Y- and Z-axis oriented LN films was optimized on A-, M- and C-sapphire by Pulsed-Injection Metal Organic Chemical Vapor Deposition (PIMOCVD), respectively. In order to obtain films with smooth surface and consisting of pure LN phase with controlled Li concentration, the deposition parameters such as growth rate, deposition temperature, solution concentration and injection frequency were tuned. A particular effort was done to obtain films with single in-plane orientation. The epitaxial quality, Li2O nonstoichiometry, in-plane orientation, residual stresses and twinning were studied by means of X-ray diffraction and Raman spectroscopy. The LN films with nearly stoichiometric composition were obtained. The thick films tend to crack and to form the twins in order to relax the high thermal stresses [2]. The cooling rate was optimized in order to avoid the relaxation of the stresses. The differences in relaxation mechanisms and in ability to withstand high stresses of X-, Y- and Z-LN films will be discussed. Energy gap and refractive indexes of LN films, measured by spectroscopic ellipsometry, were similar to those of LN single crystal. The simulations indicated that a high phase velocity and a high electromechanical coupling can be attained in LN films on sapphire. Acoustic resonance at 5.5 GHz in single-port resonators based on LN/sapphire films was demonstrated experimentally.

Published
2016

25. Influence of plasma treatments and SnO2 alloying on the conductive properties of epitaxial Ga2O3 films deposited on C-sapphire by chemical vapor deposition

Author

Maertens, Alban, Margueron, Samuel, Genty, Frédéric, Abrutis, Adulfas, Belmonte, Thierry, Boulet, Pascal, Ghanbaja, Jaafar, Talbi, Abdelkrim, Bartasyte, Ausrine, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Department of General and Inorganic Chemistry, Vilnius University [Vilnius], Institut Jean Lamour (IJL), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)

Subjects
[SPI.MAT]Engineering Sciences [physics]/Materials
Abstract

International audience; Ga2O3 thin films, alloyed with SnO2, ranging from 0 to 15 at% of Sn in composition, were grown by hot wire chemical vapor deposition on C-oriented sapphire. No conductivity was measured on the as-grown or annealed at 1000 °C samples while UV transparency was high. This contradicts the literature works on the effect of Sn4+ doping in films obtained by other methods. Besides, X-ray diffraction patterns showed the epitaxial stabilization of a new phase. The films treated by radio-frequency plasma (hydrogen and argon) presented a decrease in transparency and an increase in conductivity. The conductivity also depended on the SnO2 concentration. The hydrogen doping levels as well as polarons (due to oxygen non-stoichiometry) are suspected to play a role on the conductivity mechanism.

Published
2016

26. Epitaxy, optical and acoustical properties of X-, Y-, and Z-axis oriented LiNbO3 thin films on sapphire substrates

Author

Oliveri, Stefania, Bartasyte, Ausrine, Baron, Thomas, Salut, Roland, Margueron, Samuel, Daniau, William, Ballandras, Sylvain, Boulet, Pascal, Femto-st, Optique, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Frec'n'sys SASU (Frec'n'sys SASU), Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), Institut Jean Lamour (IJL), and Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other, [PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics], [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], [SPI.OTHER] Engineering Sciences [physics]/Other
Abstract

International audience; LiNbO3 (LN) single crystals are highly applied in acoustical, pyroelectric, acousto-optic, electro-optic, and non-linear optical devices [1]. LN thin films are attracting interest due to possibility to miniaturize, to integrate and to ameliorate the performance of these devices. Optical and surface acoustic wave (SAW) devices require the LN films with single crystallographic out-of-plane and in-plane orientations. The epitaxial growth of X-, Y- and Z-oriented films on sapphire substrates was already reported in literature. However, these LN films usually contained growth domains with different in-plane orientations. Moreover, little is known about the residual stresses and their relaxation mechanisms including twinning in these films. In this work, the epitaxial growth of X-, Y- and Z-axis oriented LN films was optimized on A-, M- and C-sapphire by Pulsed-Injection Metal Organic Chemical Vapor Deposition (PIMOCVD), respectively. In order to obtain films with smooth surface and consisting of pure LN phase with controlled Li concentration, the deposition parameters such as growth rate, deposition temperature, solution concentration and injection frequency were tuned. A particular effort was done to obtain films with single in-plane orientation. The epitaxial quality, Li2O nonstoichiometry, in-plane orientation, residual stresses and twinning were studied by means of X-ray diffraction and Raman spectroscopy. The LN films with nearly stoichiometric composition were obtained. The thick films tend to crack and to form the twins in order to relax the high thermal stresses [2]. The cooling rate was optimized in order to avoid the relaxation of the stresses. The differences in relaxation mechanisms and in ability to withstand high stresses of X-, Y- and Z-LN films will be discussed. Energy gap and refractive indexes of LN films, measured by spectroscopic ellipsometry, were similar to those of LN single crystal. The simulations indicated that a high phase velocity and a high electromechanical coupling can be attained in LN films on sapphire. Acoustic resonance at 5.5 GHz in single-port resonators based on LN/sapphire films was demonstrated experimentally.

Published
2016

27. LiNbO3 Films for Acoustic Wave Applications

Author

Bartasyte, Ausrine, Oliveri, Stefania, Baron, Thomas, Salut, Roland, Margueron, Samuel, Ballandras, Sylvain, Girons, Guillaume, Gautier, Brice, Bachelet, Romain, Albertini, David, Boulle, Alexandre, Institut Jean Lamour (IJL), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Laboratoire des technologies de la microélectronique (LTM ), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), INL - Hétéroepitaxie et Nanostructures (INL - H&N), Institut des Nanotechnologies de Lyon (INL), École Centrale de Lyon (ECL), Université de Lyon-Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École Supérieure de Chimie Physique Électronique de Lyon (CPE)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-École Centrale de Lyon (ECL), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), INL - Dispositifs Electroniques (INL - DE), Laboratoire de physique de la matière (LPM), Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), Science des Procédés Céramiques et de Traitements de Surface (SPCTS), Université de Limoges (UNILIM)-Ecole Nationale Supérieure de Céramique Industrielle (ENSCI)-Institut des Procédés Appliqués aux Matériaux (IPAM), Université de Limoges (UNILIM)-Université de Limoges (UNILIM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université de Lyon-École Centrale de Lyon (ECL), Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE), Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université de Lyon-Centre National de la Recherche Scientifique (CNRS), Femto-st, Optique, Frec'n'sys SASU (Frec'n'sys SASU), Université de Franche-Comté (UFC), Frec|N|Sys (Frec|N|Sys), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Limoges (UNILIM), Inl, Laboratoire INL UMR5270, and Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other, [PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics], [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], [SPI]Engineering Sciences [physics], [SPI.OPTI] Engineering Sciences [physics]/Optics / Photonic, [SPI] Engineering Sciences [physics], [SPI.OTHER] Engineering Sciences [physics]/Other, [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, ComputingMilieux_MISCELLANEOUS
Abstract

18-21 sept 2016; International audience; no abstract

Published
2016

28. Influence of surface treatments on the electrical and optical properties of SnO2-Ga2O3 thin films for UV wavelengths applications

Author

Maertens, Alban, Margueron, Samuel, Genty, Frédéric, Legrani, Ouarda, Abrutis, Adulfas, Belmonte, Thierry, Boulet, Pascal, Ghanbaja, Jaafar, Talbi, Abdelkrim, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Department of General and Inorganic Chemistry, Vilnius University [Vilnius], Institut Jean Lamour (IJL), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)

Subjects
[SPI.MAT]Engineering Sciences [physics]/Materials
Abstract

International audience; Ga2O3 is a wide band gap transparent conductive oxide (TCO) currently investigated for Ultra-Violet optroelectronic and photonic devices. In this study, 150nm- thick Ga2O3 - SnO2 layers (with different Sn doping) were grown on (0001) sapphire by MOCVD technique at a pressure of 10 Torr. The substrate temperature was fixed at 700°C. Phase compositions were determined by energy dispersive X-ray spectroscopy (EDX). To enhance the conductivity and transparency of Ga2O3 - SnO2 thin films, the influence of surface treatments was investigated.Subsequent thermal annealing was performed up to 1000 °C, at atmospheric pressure. The optical properties of the annealed samples present a decrease of the band gap which may originate from the contribution to indirect transition and amorphous phase. However, the resistivity remains very large (>108Ω/cm) at all SnO2 concentration. These results indicate that doping is not simply responsible for the conductivity. Vacuum annealing used to change oxygen stoichiometry did not provide any improvements. Transmission electron microscopy (TEM) analyses were carried out on annealed samples. They present a high density of nano-crystalline grains. These phases have particular orientations which are suggested twinning of Ga2O3. If nano-twinning of Ga2O3 is confirmed, that could explain the reduction of carrier’-s’ mobility and provide some explanation about the high resistivity in our films. Meanwhile, Ar+H plasma treatments6 show an increase of conductivity where hydrogen defect may plays a crucial role according to Varley et al.

Published
2015

29. Estimation of temperature dependence of C44 elastic constant in LiTaO3 single crystals

Author

Gonzalez, Minerva, Bartasyte, Ausrine, Dulmet, Bernard, Edouard Guichardaz, Blandine, Henrot, Fabien, Bassignot, Florent, Herth, Etienne, Margueron, Samuel, Ballandras, Sylvain, Kajiyama, C, Bleyl, Ingo, Brice, J, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Frec'n'sys SASU (Frec'n'sys SASU), Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)

Subjects
[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], [SPI.OTHER]Engineering Sciences [physics]/Other, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.MAT]Engineering Sciences [physics]/Materials
Abstract

International audience; In this work, electromechanical coupling factor, K2, and Temperature Coefficient of Frequency (TCF) of Bulk Acoustic Wave (BAW) resonators based on high aspect ratio ridge structures in 42°Y-X LiTaO3 (LT) and Z-cut LT single crystals with different Li stoichiometries were studied experimentally, analytically and by combined finite element / boundary element analysis. Initially, analytical analysis was carried out to determine the contribution of different elastic constants in thickness field excitation of shear modes in high aspect ratio ridge structures. The analysis shows shear modes that are dependent on C44 in ridge resonators based on 42°Y-X and Z-cut LT crystals. However, the measured frequency response of such structures exhibited many spurious resonances, making difficult the direct extraction of acoustical parameters. A fitting procedure that allows taking into account several resonances occurring simultaneously in a restricted frequency range was used. Higher K2 and more positive temperature dependence of frequency were determined for ridge structures in nearly stoichiometric crystals compared to those of equivalent structures in congruent ones.

Published
2015

30. Characterization of SnO2-Ga2O3 alloys grown by spray pyrolysis and hot wire MOCVD for wide gap transparent conductors

Author

Maertens, Alban, Margueron, Samuel, Genty, Frédéric, Abrutis, Adulfas, Silimavicius, Laimis, Kuprenaite, Sabina, Belmonte, Thierry, Boulet, Pascal, Ghanbaja, Jaafar, Talbi, Abdelkrim, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Department of General and Inorganic Chemistry, Vilnius University [Vilnius], Institut Jean Lamour (IJL), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), and UCSB

Subjects
[PHYS]Physics [physics], [SPI.MAT]Engineering Sciences [physics]/Materials
Abstract

International audience; Ga2O3 is a wide band gap transparent conductive oxide (TCO) currently investigated for Ultra-Violet optroelectronic and photonic devices. The alloying of Ga2O3 with SnO2 is expected to provide n–type conductivity1. Previous investigation concerned single crystal growth and physical growth method but the use of chemical deposition presents great interest for large scale applications. Ga2O3 - SnO2 layers were grown on (0001) sapphire either by spray pyrolysis2 under atmospheric pressure and a substrate heated at 600°C or by hot wire CVD3 under a pressure of 10 Torr and a substrate heated at 700°C. In both cases, thicknesses were between 150 and 200 nm. Compositions were determined by EDX. X-Ray diffraction patterns of layers in θ-2θ mode are depicted in Fig. 1 after growth. The undoped samples show a preferential growth direction with the family of lattice planes {-201}. This relation is kept for tin concentration up 15% while the interatomic distance decreases with an increase in SnO2 concentration. Amorphous patterns are observed beyond 21 mol%. Two remaining peaks in the XRD pattern of the heavily Sn-doped Ga2O3 film may probably attributed to (200) and (400) peaks of SnO2 phase, and may be related with a partial segreagation of SnO2 crystallites. Subsequent thermal annealing’s were performed for 15 min at temperature up to 1000°C either at atmospheric pressure or at 0.01 Torr showing a very weak crystallization of gallium oxide.The optical properties of the annealed samples present a decrease in the band gap from 5 eV down to 4.6 eV to 21% SnO2 quite independently from the chosen growth process or annealing method (Fig 3). On the other hand, transmission measurements deviate from a direct absorption gap. The additional tails can originate from indirect transition or Urbach mechanism associated with Sn incorporation (Fig. 2). However, the resistivity remains very high in all samples (>108Ω/cm). These results indicate that doping is not simply responsible for the conductivity. Vacuum annealing used to change oxygen stoichiometry did not provide any improvements. Transmission electron microscopy (TEM) analyses were carried out on annealed samples. They present a high density of nano-crystalline grains. These phases have particular orientations which are related to the twinning of Ga2O3. The nano-twinning of Ga2O3 can explain the reduction of carrier’-s’ mobility and provide some explanation about the high resistivity in our films. Others annealing and plasma treatments5 will be presented to corroborate these results.

Published
2015

31. Elaboration of In2O3-ZnO Thin Films for Mid-Infrared Transparent Electrode Applications

Author

Maertens, Alban, Margueron, Samuel, Genty, Frédéric, Kuprenaire, Sabina, Abrutis, Adulfas, Legrani, Ouarda, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), Université de Lorraine (UL)-CentraleSupélec, Department of General and Inorganic Chemistry, Vilnius University [Vilnius], and CentraleSupélec-Université de Lorraine (UL)

Subjects
[SPI]Engineering Sciences [physics], [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2015
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32. Elaboration of In2O3 -ZnO Thin Films for Mid-Infrared Transparent Electrode Applications

Author

Maertens, Alban, Genty, Frédéric, Margueron, Samuel, Kuprenaite, Sabina, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
Abstract

International audience; In this paper, the effect of zinc proportion in structural, electrical, and optical properties of In2O3 thin films was investigated. 100 nm-thick crystallize indium–zinc–oxide (IZO) thin films were grown by spray pyrolysis method on C-plan sapphire, (001)-silicon, (001)-GaN tamplate and YSZ substrates. The electrical conductivity measurements show a strong influence of the substrate. The best composition for 3µm Vertical Cavity Surface Emitting Laser (VCSEL) top contact is found at 18% at. Zn with a maximum IR transparency of 80%. The possibility to synthetize a p-type thin films was also demonstrated.

Published
2015

34. Influence of RF Plasma on Zinc Oxide Surface Properties

Author

Maertens, Alban, Margueron, Samuel, Genty, Frédéric, Legrani, Ouarda, Belmonte, Thierry, Boulet, Pascal, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Institut Jean Lamour (IJL), and Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2014

35. Fluorescence imaging of plant pigments for automatical recognition of aquatic organisms

Author

Lauffer, Mathieu, Genty, Frédéric, Margueron, Samuel, Collette, Jean-Luc, Levey, Annie, Houzelle, Yves, Pihan, Jean-Claude, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Georgia Tech Lorraine [Metz], Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-Georgia Institute of Technology [Atlanta]-CentraleSupélec-Ecole Nationale Supérieure des Arts et Metiers Metz-Centre National de la Recherche Scientifique (CNRS), Laboratoire Interdisciplinaire des Environnements Continentaux (LIEC), Institut national des sciences de l'Univers (INSU - CNRS)-Observatoire Terre et Environnement de Lorraine (OTELo), Institut national des sciences de l'Univers (INSU - CNRS)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS)-Institut national des sciences de l'Univers (INSU - CNRS)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS)-Institut Ecologie et Environnement (INEE), Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS), and Van Luchene, Sébastien

Subjects
[SPI]Engineering Sciences [physics], [SPI] Engineering Sciences [physics], ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2014

36. Traitement d'images pour la reconnaissance d'organismes aquatiques

Author

Lauffer, Mathieu, Jacquet, Joël, Genty, Frédéric, Margueron, Samuel, Collette, Jean-Luc, Van Luchene, Sébastien, OPTEL - Equipe Optique et électronique pour les télécoms, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL)-CentraleSupélec-Université de Lorraine (UL), CentraleSupélec-Université de Lorraine (UL), SUPELEC-Campus Metz, and Ecole Supérieure d'Electricité - SUPELEC (FRANCE)

Published
2013

37. Characterization by Raman Spectroscopy of nano and micro structures in lithium niobate

Author

Bourson, Patrice, Zelenovskiy, Pavel, Fontana, M.D., margueron, Samuel, Aillerie, Michel, Shur, Vladimir, Kuznetsov, Dmitri, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Ferroelectric Laboratory, Ural Center for Shared Used 'Modern nanotechnology'-Ural Federal University [Ekaterinburg] (UrFU)-Ural Center for Shared Used 'Modern nanotechnology'-Ural Federal University [Ekaterinburg] (UrFU), and Kauffmann, Thomas

Subjects
[PHYS]Physics [physics], ComputingMilieux_MISCELLANEOUS, [PHYS] Physics [physics]
Abstract

International audience

Published
2010

38. Two color excitation of polaron luminescence in reduced LiNbO3 crystals

Author

Kostritskii, Sergey, Aillerie, Michel, Margueron, Samuel, Bourson, Patrice, Aillerie, Michel, RPC Optolink, MPTE Department (MPTE Dept.), Moscow Institute of Electronic Technology-Moscow Institute of Electronic Technology, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), and CentraleSupélec-Université de Lorraine (UL)

Subjects
[PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics], [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], [SPI.OPTI] Engineering Sciences [physics]/Optics / Photonic, [SPI.NRJ]Engineering Sciences [physics]/Electric power, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, ComputingMilieux_MISCELLANEOUS, [SPI.TRON] Engineering Sciences [physics]/Electronics, [SPI.TRON]Engineering Sciences [physics]/Electronics, [SPI.NRJ] Engineering Sciences [physics]/Electric power
Abstract

International audience

Published
2010

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