1. Tungsten oxide thin film bombarded with a low energy He ion beam: evidence for a reduced erosion and W enrichment
- Author
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Y. Addab, P. Roubin, Martiane Cabié, Hussein Hijazi, Fred W Meyer, C. Pardanaud, Claire Martin, Bruno Domenichini, Mark E. Bannister, G. Giacometti, Physique des interactions ioniques et moléculaires (PIIM), Aix Marseille Université (AMU)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Interdisciplinaire Carnot de Bourgogne [Dijon] (LICB), Université de Bourgogne (UB)-Université de Technologie de Belfort-Montbeliard (UTBM)-Centre National de la Recherche Scientifique (CNRS), Centre Pluridisciplinaire de Microscopie Electronique et de Microanalyse (AMU CP2M), Aix Marseille Université (AMU), Physique des interactions ioniques et moléculaires ( PIIM ), Aix Marseille Université ( AMU ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratoire Interdisciplinaire Carnot de Bourgogne [Dijon] ( LICB ), Université de Technologie de Belfort-Montbeliard ( UTBM ) -Université de Bourgogne ( UB ) -Centre National de la Recherche Scientifique ( CNRS ), Centre Pluridisciplinaire de Microscopie Electronique et de Microanalyse ( AMU CP2M ), Aix Marseille Université ( AMU ), Laboratoire Interdisciplinaire Carnot de Bourgogne (ICB), Université de Technologie de Belfort-Montbeliard (UTBM)-Université de Bourgogne (UB)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)
- Subjects
Materials science ,Ion beam ,thin film ,[ PHYS.COND.CM-MS ] Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ,01 natural sciences ,tungsten oxide ,010305 fluids & plasmas ,Low energy ,[PHYS.PHYS.PHYS-PLASM-PH]Physics [physics]/Physics [physics]/Plasma Physics [physics.plasm-ph] ,0103 physical sciences ,Thin film ,Composite material ,He ion bombardment ,Mathematical Physics ,010302 applied physics ,electron microscopy ,Tungsten oxide ,[ PHYS.PHYS.PHYS-PLASM-PH ] Physics [physics]/Physics [physics]/Plasma Physics [physics.plasm-ph] ,Condensed Matter Physics ,erosion ,Atomic and Molecular Physics, and Optics ,13. Climate action ,Raman spectroscopy ,Erosion ,[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ,sputtering yield - Abstract
International audience; Nanocrystalline tungsten oxide (WO 3) thin films synthesized by thermal oxidation of tungsten substrates were exposed to low energy helium ions (energy: 80 eV; flux: 1.4-1.7×10 20 m-2 s-1) at room temperature and at 673 K. The structure and morphology changes of the oxide were studied using Raman spectroscopy and electron microscopy. Due to the low ion energy, no erosion is observed at room temperature. On the contrary, at 673 K, a colour change is observed and a significant erosion is measured (~ 70 nm for a fluence of ~ 4×10 21 m-2) due to a synergetic effect between ion bombardment and heating. We show that erosion processes and structural changes strongly depend on the ion fluence and in particular the higher the fluence, the lower the erosion yield, most likely due to oxygen depletion in the oxide near-surface layers.
- Published
- 2017
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