1. Modeling of SrTiO3 polycrystalline substrate grain growth for tuning thin film functional properties
- Author
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Marie Dallocchio, Charles Manière, Jérôme Lecourt, Ulrike Lüders, Wilfrid Prellier, Adrian David, Arnaud Fouchet, Laboratoire de cristallographie et sciences des matériaux (CRISMAT), Université de Caen Normandie (UNICAEN), Normandie Université (NU)-Normandie Université (NU)-École Nationale Supérieure d'Ingénieurs de Caen (ENSICAEN), Normandie Université (NU)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche sur les Matériaux Avancés (IRMA), Normandie Université (NU)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université de Rouen Normandie (UNIROUEN), Normandie Université (NU)-Institut national des sciences appliquées Rouen Normandie (INSA Rouen Normandie), Institut National des Sciences Appliquées (INSA)-Normandie Université (NU)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université de Rouen Normandie (UNIROUEN), Institut National des Sciences Appliquées (INSA)-Normandie Université (NU)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), and ANR-17-CE08-0012,Polynash,Substrats bas couts polycristallins et Nanofeuillets de germination(2017)
- Subjects
Functional thin film ,Modeling ,[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ,General Materials Science ,Polycrystalline substrates ,Grain growth - Abstract
International audience; In the Combinatorial Substrate Epitaxy (CSE) approach, a thin film is grown at high temperature on a polycrystalline substrate. Those substrates induce a local film epitaxy on each substrate grain and an overall polycrystalline character on the macroscopic scale. Compared to single-crystalline films, this approach provides the possibility to introduce, in a controlled way, grain boundaries providing new functionalities. Therefore, controlling the microstructure and grain size of the substrates is an important step for tuning the film properties. In this paper, a complete study of the granular growth of the standard substrate material for the deposition of perovskite thin films, SrTiO3, has been carried out with different isothermal cycles highlighting the grain growth mechanisms. From these results, we are able to predict the sintering thermal cycle necessary for targeting very precisely a desired grain size and the corresponding physical properties. Indeed, highly restraint physical properties specifications are needed for advanced electronic applications. Since a classic granular growth model was used, this approach can be generalized to the broad family of oxides.
- Published
- 2023
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