1. Electron tomography combining ESEM and STEM: A new 3D imaging technique
- Author
-
José Ferreira, Catherine Gauthier, P. Jornsanoh, G. Thollet, Karine Masenelli-Varlot, Agnès Bogner, Matériaux, ingénierie et science [Villeurbanne] (MATEIS), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), Consortium Lyon Saint-Etienne de Microscopie (CLYM), École normale supérieure - Lyon (ENS Lyon)-École Centrale de Lyon (ECL), Université de Lyon-Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université Jean Monnet [Saint-Étienne] (UJM), Matériaux, ingénierie et science [Villeurbanne] ( MATEIS ), Université Claude Bernard Lyon 1 ( UCBL ), Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique ( CNRS ) -Institut National des Sciences Appliquées de Lyon ( INSA Lyon ), Université de Lyon-Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ), Consortium Lyon Saint-Etienne de Microscopie ( CLYM ), École normale supérieure - Lyon ( ENS Lyon ) -École Centrale de Lyon ( ECL ), Université de Lyon-Université de Lyon-Université Claude Bernard Lyon 1 ( UCBL ), Université de Lyon-Institut National des Sciences Appliquées de Lyon ( INSA Lyon ), Université de Lyon-Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Université Jean Monnet [Saint-Étienne] ( UJM ), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), École normale supérieure de Lyon (ENS de Lyon)-École Centrale de Lyon (ECL), and Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Jean Monnet - Saint-Étienne (UJM)
- Subjects
electron tomography ,02 engineering and technology ,Imaging techniques ,X ray analysis ,01 natural sciences ,[SPI.MAT]Engineering Sciences [physics]/Materials ,equipment design ,Scanning transmission electron microscopy ,image quality ,Instrumentation ,Environmental scanning electron microscope ,010302 applied physics ,Resolution (electron density) ,three dimensional imaging ,Low-atomic number materials ,article ,STEM ,021001 nanoscience & nanotechnology ,image reconstruction ,ESEM ,Atomic and Molecular Physics, and Optics ,structure analysis ,Electronic, Optical and Magnetic Materials ,Characterization (materials science) ,scanning transmission electron microscopy ,0210 nano-technology ,Scanning electron microscopy ,Atoms ,Materials science ,Electric impedance tomography ,Three-dimensional characterization ,Characterization ,[ SPI.MAT ] Engineering Sciences [physics]/Materials ,environmental scanning electron microscopy ,Electrons ,Conductive materials ,Optics ,process optimization ,0103 physical sciences ,atomic particle ,Energy filtered transmission electron microscopy ,controlled study ,image enhancement ,High-resolution transmission electron microscopy ,intermethod comparison ,business.industry ,Three dimensional ,Scanning confocal electron microscopy ,thickness ,process development ,Non-conductive samples ,Electron tomography ,business ,Large tomogram ,Transmission electron microscopy ,instrument validation - Abstract
cited By 13; International audience; This paper presents the development and the application of a new electron tomography technique based on STEM (Scanning Transmission Electron Microscopy) configuration in ESEM (Environmental Scanning Electron Microscopy). This combination provides a new approach for the characterization of the 3D structure of materials, as it optimizes a compromise between the resolution level of a few tens of nm and the large tomogram size due to the high thickness of transparency. The method is well adapted for non-conductive samples, and exhibits good contrast even for materials with low atomic number. The paper describes the development of a dedicated stage for this new tomography technique. Taking advantage of the size of the ESEM chamber, the range of tilt angles is not limited by the space around the sample. The performance of this device is illustrated through the three-dimensional characterization of samples issued from materials science and chosen to illustrate the results in resolution, contrast and thickness. © 2011 Elsevier B.V.
- Published
- 2011