1. Fabrication of ZnO micro- and nano-structures by electrodeposition using nanoporous and lithography defined templates
- Author
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Yamin Leprince-Wang, Martine Capo-Chichi, Yong Chen, Lei Lei, Julien Leopoldes, Salah Bouchaib, Kevin Laurent, Sandrine Tusseau-Nenez, Tayeb Brouri, Laboratoire de Physique des Matériaux Divisés et des Interfaces (LPMDI), Université Paris-Est Marne-la-Vallée (UPEM)-Centre National de la Recherche Scientifique (CNRS), Institut de Chimie et des Matériaux Paris-Est (ICMPE), Institut de Chimie du CNRS (INC)-Université Paris-Est Créteil Val-de-Marne - Paris 12 (UPEC UP12)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de microfluidique, organisation chimique et nanotechnologies, Processus d'Activation Sélective par Transfert d'Energie Uni-électronique ou Radiatif (UMR 8640) (PASTEUR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Département de Chimie - ENS Paris, École normale supérieure - Paris (ENS-PSL), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-École normale supérieure - Paris (ENS-PSL), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université Pierre et Marie Curie - Paris 6 (UPMC)-Département de Chimie - ENS Paris, Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), École normale supérieure - Paris (ENS Paris), and Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-École normale supérieure - Paris (ENS Paris)
- Subjects
Lithography ,Fabrication ,Materials science ,Scanning electron microscope ,Micro-rods ,Nanowire ,Nanotechnology ,02 engineering and technology ,01 natural sciences ,Monocrystalline silicon ,Electrodeposition ,0103 physical sciences ,General Materials Science ,Nanoimprint ,High-resolution transmission electron microscopy ,Wurtzite crystal structure ,010302 applied physics ,Nanowires ,Nanoporous ,Template ,Mechanical Engineering ,Nano-pillars ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Mechanics of Materials ,Transmission electron microscopy ,ZnO ,[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ,0210 nano-technology - Abstract
International audience; Wereport in this work the fabrication of ZnO nanowires and nano-pillars by electrodeposition using three types of micro- and nano-structured templates. First, ZnO nanowires were synthesized in a nanoporous polycarbonate template and their morphology and monocrystalline structure were checked by conventional transmission electron microscopy (TEM) and high-resolution transmission electron microscopy (HRTEM) techniques. The optical properties of the monocrystalline ZnO nanowires were also studied by measuring the photo-fluorescence spectra of the sample. Then, the micro-structured template was made by optical lithography and the electrodeposited ZnO micro-rods were analysed by scanning electron microscopy (SEM) imaging and X-ray diffraction (XRD). Finally, UV-nanoimprint templates were used for the fabrication of regular ZnO nano-pillar array. SEM images showed quite homogenous ZnO nano-pillar array on which the collective I–V characteristic has been carried out in order to determine the nature of the Au/ZnO contact. SEM images also revealed an effect of size increase of the ZnO microrods and nano-pillars with respect to that of the PMMA template. XRD patterns showed the hexagonal Wurtzite crystalline structure with cell parameters slightly larger than the literature ones.
- Published
- 2010
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