14 results on '"Shamiryan, D."'
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2. Integrated diffusion–recombination model for describing the logarithmic time dependence of plasma damage in porous low-k materials
3. In-line control of Si loss after post ion implantation strip
4. Effect of top power on a low-k film during oxygen strip in a TCP etch chamber
5. Dry etching process for bulk finFET manufacturing
6. Oxygen chemiluminescence in He plasma as a method for plasma damage evaluation
7. Diffusion of solvents in thin porous films
8. Spacer defined FinFET: Active area patterning of sub-20nm fins with high density
9. Implementation of high-k and metal gate materials for the 45nm node and beyond: gate patterning development
10. Low-k dielectric materials
11. Pinhole density measurements of barriers deposited on low-k films
12. Simulations of diffusion barrier deposition on porous low-k films
13. Investigation of barrier and slurry effects on the galvanic corrosion of copper
14. Comparative study of PECVD SiOCH low-k films obtained at different deposition conditions
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