1. Optical, structural and aging properties of Al/Sc-based multilayers for the extreme ultraviolet
- Author
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Jennifer Rebellato, Cédric Baumier, Florian Pallier, Eric M. Gullikson, Evgueni Meltchakov, Regina Soufli, Sébastien de Rossi, and Franck Delmotte
- Subjects
Diffraction ,Materials science ,Extreme ultraviolet lithography ,Metals and Alloys ,Analytical chemistry ,Surfaces and Interfaces ,Orders of magnitude (numbers) ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,law.invention ,Electron diffraction ,Transmission electron microscopy ,law ,Extreme ultraviolet ,Materials Chemistry ,Crystallization ,Nanoscopic scale - Abstract
This manuscript presents the structural characterization of Al/Sc-based periodic multilayer coatings for the extreme ultraviolet (EUV) spectral range. Based on transmission electron microscopy and electron diffraction as well as grazing-incidence and large-angle x-ray diffraction, a model for the layer structure and the interfacial effects of Al/Sc coatings is built. The onset of crystallization in nanoscale Al and Sc layers as a function of thickness is also revealed in these characterizations. The Al/Sc layer model is validated and further refined by fitting in-band and out-of-band EUV reflectance measurements across 5 orders of magnitude in an extended wavelength range from 17 to 80 nm. The same type of EUV reflectance measurements is used to test the Al/Sc aging properties and to demonstrate the spectral response of optimized two- and tri-material multilayers including Al/Sc, Al/Sc/SiC and Mo/Al/Sc.
- Published
- 2021
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