1. Microcantilevers encapsulated in fluid wells for sensing in liquids
- Author
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W.H.A. Wien, Pasqualina M. Sarro, Warner J. Venstra, and J. van Eijk
- Subjects
Microelectromechanical systems ,Gold layer ,Cantilever ,Materials science ,Optical lever ,Nanotechnology ,Condensed Matter Physics ,Atomic and Molecular Physics, and Optics ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,law.invention ,chemistry.chemical_compound ,Silicon nitride ,chemistry ,law ,Monolayer ,Wafer ,Electrical and Electronic Engineering ,Photolithography - Abstract
We fabricated arrays of cantilever sensors suspended deep inside fluid wells. To eliminate critical alignment and assembling steps during encapsulation of the cantilevers, these 3-D MEMS devices are realized in a single-side, single-wafer process by employing photolithography on bulk micromachined substrates. Silicon nitride cantilevers with varying geometries are suspended up to [email protected] below the wafer surface, and a structured gold layer is patterned on top. After calibrating the cantilevers in an optical lever setup, the formation of a DNA monolayer on the cantilever surface is detected.
- Published
- 2012
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