1. Micromechanical High-doses Radiation Sensor with Bossed Membrane and Interferometry Optical Read-out
- Author
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Émilie Debourg, K. Sareło, I. Augustyniak, P. Knapkiewicz, Patrick Pons, Jan Dziuban, M. Olszacki, Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology, Équipe MIcro et Nanosystèmes pour les Communications sans fil (LAAS-MINC), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, National Center for Nuclear Research (NCBJ), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)
- Subjects
Microelectromechanical systems ,Materials science ,Silicon ,business.industry ,optical read-out ,chemistry.chemical_element ,membrane deflection ,General Medicine ,Interferometry ,Membrane ,Optics ,chemistry ,Deflection (physics) ,bossed membrane ,high doses of radiation ,Radiolysis ,MEMS radiation sensor ,High-density polyethylene ,Irradiation ,polyethylyne degradation ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,business ,Engineering(all) - Abstract
International audience; The silicon-glass MEMS high-doses radiation sensor with in situ detection, so far not possible in the field of detection of doses above 10 kGy, has been presented. The sensor consists of a chamber filled with the high density polyethylene (HDPE) and a silicon bossed membrane. The radiolysis product of HDPE increases the pressure inside the chamber causing the deflection of the membrane, which is proportional to the pressure, thus to radiation dose. The sensor has been irradiated with high energy electron beam and shows good detectability for 10-40 kGy. The deflection of the membrane has been detected by optical interferometer.
- Published
- 2014