1. Dynamic analysis of tapping mode atomic force microscope (AFM) for critical dimension measurement
- Author
-
Wuweikai Xiang, Xianping Liu, and Yanling Tian
- Subjects
0209 industrial biotechnology ,Materials science ,Cantilever ,Frequency drift ,General Engineering ,Phase (waves) ,Equations of motion ,Stiffness ,02 engineering and technology ,Mechanics ,021001 nanoscience & nanotechnology ,Method of averaging ,Vibration ,020901 industrial engineering & automation ,medicine ,medicine.symptom ,0210 nano-technology ,Critical dimension - Abstract
Transient dynamics of tapping mode atomic force microscope (AFM) for critical dimension measurement are analyzed. A simplified nonlinear model of AFM is presented to describe the forced vibration of the micro cantilever-tip system with consideration of both contact and non-contact transient behavior for critical dimension measurement. The governing motion equations of the AFM cantilever system are derived from the developed model. Based on the established dynamic model, motion state of the AFM cantilever system is calculated utilizing the method of averaging with the form of slow flow equations. Further analytical solutions are obtained to reveal the effects of critical parameters on the system dynamic performance. In addition, features of dynamic response of tapping mode AFM in critical dimension measurement are studied, where the effects of equivalent contact stiffness, quality factor and resonance frequency of cantilever on the system dynamic behavior are investigated. Contact behavior between the tip and sample is also analyzed and the frequency drift in contact phase is further explored. Influence of the interaction between the tip and sample on the subsequent non-contact phase is studied with regard to different parameters. The dependence of the minimum amplitude of tip displacement and maximum phase difference on the equivalent contact stiffness, quality factor and resonance frequency are investigated. This study brings further insights into the dynamic characteristics of tapping mode AFM for critical dimension measurement, and thus provides guidelines for the high fidelity tapping mode AFM scanning.
- Published
- 2020