1. Investigation of p-type doping in β- and κ-Ga2O3
- Author
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George C. Schatz, Leighton O. Jones, Charles J. Zeman, Samuel M. Kielar, and Martín A. Mosquera
- Subjects
Coordination sphere ,Materials science ,Dopant ,Silicon ,Mechanical Engineering ,Fermi level ,Metals and Alloys ,chemistry.chemical_element ,02 engineering and technology ,Electronic structure ,010402 general chemistry ,021001 nanoscience & nanotechnology ,01 natural sciences ,Acceptor ,0104 chemical sciences ,symbols.namesake ,Crystallography ,chemistry ,Mechanics of Materials ,Materials Chemistry ,symbols ,Density functional theory ,Gallium ,0210 nano-technology - Abstract
We have systematically investigated the effects of all possible combinations of vacancies and silicon substitutions on the electronic structure of the β and κ phases of Ga2O3 using plane-wave density functional theory (DFT) methods. It was found that VGa defects are associated with a sufficient shift of the Fermi level to lower energy to induce p-type behavior, with formation energies in the range of 9.0 ± 0.2 eV. Calculations with single atom substitutions in the κ phase, including nitrogen, phosphorous, and silicon, did not show p-type character, although NO substitutions may lead to shallow acceptor states. In the pursuit of elucidating how MOCVD growth of Ga2O3 can result in p-type behavior, as indicated by experimental results in the literature, we examined the role of combining hydrogen and silicon substitutions. The results showed that p-type behavior is observable when gallium atoms are substituted for hydrogen within the coordination sphere of SiO substitutions. This shows that silicon can act as an amphoteric dopant for p-type Ga2O3 semiconducting materials when hydrogen is included with formation energies
- Published
- 2021
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