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Abstract: A novel self-aligned μTrench-based cell architecture for phase change memory (PCM) process is presented. The low programming current and the good dimensional control of the sub-lithographic features achieved with the μTrench structure are combined with a self-aligned patterning strategy that simplify the integration process in term of alignment tolerances and of number of critical masks. The proposed architecture has been integrated in a 90nm 128Mb vehicle based on a pnp bipolar junction transistor for the array selection. The good active and leakage currents achieved by the purposely optimized selecting transistors combined with programming currents of 300μA of the storage element and good distributions measured on the 128Mb array demonstrate the suitability of the proposed architecture for the production of high-density PCM arrays at 90nm and beyond. [Copyright &y& Elsevier]

Abstract: In order to validate phase change memory (PCM) technology, the programming reliability, in terms of reading window between the programmed and erased state, must be guaranteed at array level with an error less then 1 part-per-billion. The reset distribution is significantly influenced by the quenching operation [Mantegazza D, Ielmini D, Pirovano A, Gleixner B, Lacaita A L, Varesi E, et al. Electrical characterization of anomalous cells in phase change memory arrays. IEDM Tech Dig 2006:53–56]. In this paper this phenomenon is explained in terms of PCM active material crystallization statistics. A significant spread in the crystallization times among PCM cells is detected both in the write-reset operation from the melted-amorphous state (quenching) and in the erase-set operation from the solid-amorphous state. At statistical level, a correlation between set at high and low temperatures and quenching behavior of cells is found, allowing to describe the programming distributions uniquely in terms of crystallization times statistics. [Copyright &y& Elsevier]

Abstract: Emerging phase-change memory (PCM) technology for non-volatile applications presents many potential advantages in terms of scalability, endurance and program/read speed. While several integration issues have still to be solved before achieving volume-production stage, the fundamental physics of chalcogenide switching and phase-change behaviour has still to be comprehensively understood. This paper provides an in-depth analysis of the switching and programming transient in PCM cells. It is shown that the cell parasitic capacitance can lead to a marked current overshoot in the programming transient. As evidenced by experiments, this overshoot is able to melt and quench the active material as in a reset operation. The parasitic reset results in a series distribution of crystalline and amorphous phases after program. The analysis of array cell capacitance instead indicates that no parasitic reset is to be expected, allowing for a localized crystallization during program, as previously obtained by numerical simulations. [Copyright &y& Elsevier]