100 results on '"Masuda, Atsushi"'
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2. Study on silicon-slicing technique using plasma-etching processing
3. Investigation on the crystal growth process of spherical Si single crystals by melting
4. Improvement of the uniformity in electronic properties of AZO films using an rf magnetron sputtering with a mesh grid electrode
5. Coverage properties of SiN x films prepared by catalytic chemical vapor deposition on trenched substrates below 80 °C
6. Cat-CVD SiN passivation films for OLEDs and packaging
7. A concentrator module of spherical Si solar cell
8. High-rate deposition of SiN x films over 100 nm/min by Cat-CVD method at low temperatures below 80 °C
9. Systematic study on photoresist removal using hydrogen atoms generated on heated catalyzer
10. Formation of highly moisture-resistive SiN x films on Si substrate by Cat-CVD at room temperature
11. Preparation of SiN x gate-insulating films for bottom-gate type TFTs by Cat-CVD method
12. Various applications of silicon nitride by catalytic chemical vapor deposition for coating, passivation and insulating films
13. Present status and future feasibility for industrial implementation of Cat-CVD (Hot-Wire CVD) technology
14. H 2 dilution effect in the Cat-CVD processes of the SiH 4/NH 3 system
15. Study on change in SIMS intensities near the interface between silicon-nitride film and silicon substrate
16. Catalytic decomposition of HCN on heated W surfaces to produce CN radicals
17. Cat-CVD (hot-wire CVD): how different from PECVD in preparing amorphous silicon
18. Irreducible elbow fracture-dislocation in adults due to medial component incarceration: Two case reports and literature review
19. Deposition chemistry in the Cat-CVD processes of the SiH 4/NH 3 system
20. Fabrication of a-Si 1− xC x:H thin films for solar cells by the Cat-CVD method using a carbon catalyzer
21. Crystallization by excimer laser annealing for a-Si:H films with low hydrogen content prepared by Cat-CVD
22. Recent progress of Cat-CVD research in Japan—bridging between the first and second Cat-CVD conferences
23. Development of Cat-CVD apparatus for 1-m-size large-area deposition
24. In situ chamber cleaning using atomic H in catalytic-CVD apparatus for mass production of a-Si:H solar cells
25. Influence of atomic hydrogen on transparent conducting oxides during hydrogenated amorphous and microcrystalline Si preparation by catalytic chemical vapor deposition
26. Oxidation process in pulsed laser ablation of Si with various ambients
27. High performance amorphous-silicon thin film transistors prepared by catalytic chemical vapor deposition with high deposition rate
28. Low-k silicon nitride film for copper interconnects process prepared by catalytic chemical vapor deposition method at low temperature
29. Preparation of SiNx passivation films for PZT ferroelectric capacitors at low substrate temperatures by catalytic CVD
30. A Cat-CVD Si3N4 film study and its application to the ULSI process
31. Fabrication of amorphous carbon nitride films by hot-wire chemical vapor deposition
32. Formation of silicon films for solar cells by the Cat-CVD method
33. Proposal of catalytic chemical sputtering method and its application to prepare large grain size poly-Si
34. Influence of a-Si:H deposition by catalytic CVD on transparent conducting oxides
35. High-stability hydrogenated amorphous silicon films for light-soaking prepared by catalytic CVD at high deposition rates
36. Guiding principles for device-grade hydrogenated amorphous silicon films and design of catalytic chemical vapor deposition apparatus
37. Photo-induced volume changes in a-Si:H films prepared by Cat-CVD method
38. Development of Cat-CVD apparatus — a method to control wafer temperatures under thermal influence of heated catalyzer
39. Identification and gas phase kinetics of radical species in Cat-CVD processes of SiH4
40. Dominant parameter determining dangling-bond density in hydrogenated amorphous silicon films prepared by catalytic chemical vapor deposition
41. Surface cleaning and nitridation of compound semiconductors using gas-decomposition reaction in Cat-CVD method
42. Suppression of hexagonal GaN mixing by As 4 molecular beam in cubic GaN growth on GaAs (0 0 1) substrates
43. Which surgical procedure is effective for refractory chronic subdural hematoma? Analysis of our surgical procedures and literature review.
44. Changes in the current density–voltage and external quantum efficiency characteristics of n-type single-crystalline silicon photovoltaic modules with a rear-side emitter undergoing potential-induced degradation.
45. Improvement of Endo-β-N-acetylglucosaminidase H production using silkworm–baculovirus protein expression system.
46. Baculovirus-mediated gene transfer systems in silkworm larvae using constitutive host promoters.
47. 8 - Properties of Phosphorus-Doped Polycrystalline Silicon Films Formed by Catalytic Chemical Vapor Deposition and Successive Rapid Thermal Annealing
48. Highly moisture-resistive silicon nitride films prepared by catalytic chemical vapor deposition and application to gallium arsenide field-effect transistors
49. Oxidative stress-induced apoptosis is associated with alterations in mitochondrial caspase activity and Bcl-2-dependent alterations in mitochondrial pH (pHm)
50. What is the difference between catalytic CVD and plasma-enhanced CVD? Gas-phase kinetics and film properties
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