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Start Over Author "Ma, Tianfu" Publisher elsevier b.v.
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5. Visible electroluminescence from amorphous hydrogenated silicon carbide prepared by using organic carbon source

Author

Huang, Xiaohui, Ma, Tianfu, Xu, Jun, Li, Zhifeng, Mei, Jiaxin, Li, Xin, Li, Wei, Huang, Xinfan, and Chen, Kunji

Subjects
*SILICON carbide, *THIN films, *CHEMICAL vapor deposition, *ELECTROLUMINESCENCE
Abstract

A series of amorphous silicon carbide (a-SiC:H) films were prepared by using an organic carbon source, xylene, in a plasma chemical vapor deposition system. Visible electroluminescence (EL) was observed from the device structures of Al/a-Si:H/a-SiC:H/ITO/glass at room temperature. The EL peak was changed from 2.0 to 2.3 eV with increasing carbon content in a-SiC:H films and the EL devices have open voltages at approximately 2.5 V. The EL behavior was investigated and the influence of the EL device structure was also discussed in the paper. [Copyright &y& Elsevier]

Published
2003
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