Raja, P. Vigneshwara, Raynaud, Christophe, Sonneville, Camille, Eric N'Dohi, Atse Julien, Morel, Hervé, Phung, Luong Viet, Ngo, Thi Huong, De Mierry, Philippe, Frayssinet, Eric, Maher, Hassan, Tasselli, Josiane, Isoird, Karine, Morancho, Frédéric, Cordier, Yvon, and Planson, Dominique
This paper reports comprehensive characterization of vertical GaN-on-GaN Schottky barrier diodes (SBDs) fabricated on free-standing GaN substrates. The GaN active layer properties are evaluated by atomic force microscopy (AFM), secondary-ion mass spectrometry (SIMS), micro-Raman spectroscopy, cathodoluminescence (CL), and deep-level transient Fourier spectroscopy (DLTFS). The GaN SBDs exhibit near-unity ideality factor (n = 1.1), promising Schottky barrier height (SBH) of Φ B = 0.82 eV, low turn-on voltage ∼0.56 V, leakage current density of J R < 5.5 × 10−6 Acm−2 at −100 V, breakdown voltage V BR < −200 V, and less interface state density (N SS < 5 × 1012 eV−1 cm−2) at the Ni/GaN Schottky contact. The forward and reverse current transport mechanisms of the SBD are identified by fitting analysis of measured J-V. Weak temperature dependence of Φ B and n is detected from I–V-T measurements. Similar traps at E C - 0.18 eV and E C - 0.56 are identified in the various SBDs from DLTFS, signifying that these traps are omnipresent defects in the epilayer. • Comprehensive characterizations are carried out for vertical GaN-on-GaN Schottky barrier diodes (SBDs). • Typical electrical characteristics of quasi-ideal vertical GaN-on-GaN SBDs are reported. • Various current transport mechanisms involved during forward and reverse characteristics of the SBD are identified. • The GaN active layer properties are evaluated by AFM, SIMS, micro-Raman spectroscopy, cathodoluminescence (CL). • Furthermore, traps in the GaN diodes are detected by deep level transient Fourier spectroscopy (DLTFS). [ABSTRACT FROM AUTHOR]