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Abstract: A silicon etching process using an ultrafine particle dispersion is proposed. The ultrafine particles contain quaternary ammonium hydroxide groups as ion-exchange groups, giving an alkaline dispersion. In the etching process, the fine particles and impurity ions can be easily separated by filtration or dialysis. Dialysis led to a decrease in the concentration of impurities in the dispersion, which included heavy metal ions and alkali metal ions known to result in a rough etched surface and affect the electronic properties of the semiconductor. Our proposed method is applicable to the surface planarization of silicon single crystals, manufacture of semiconductor devices, and fabrication of MEMS (micro-electro and mechanical systems). In addition, the etching waste can be reused after removal of the impurity ions by dialysis. Thus, the method has low environmental burden. Using the proposed alkaline etching dispersion, cathodic electrochemical etching of a silicon single crystal was demonstrated. The etching characteristics, properties of the etched surface, and effects of particle size were evaluated. The roughness of a 2μm×2μm etched p-Si(001) surface was measured to be 0.1228nm Ra (center line average roughness) by AFM. [Copyright &y& Elsevier]

Abstract: Electrochemical etching enables processing with an atomic-level accuracy, without deteriorating the physical properties of the workpiece; however, contamination of its surface with electrolytes is unavoidable. If it is possible to carry out electrochemical etching without using electrolytes, such a process will be applicable to electronic device manufacturing and precision nanoscale processing of semiconductor materials. In addition, this process does not require the use of chemicals, cleaning after processing or disposal of waste fluid, which results in a low-cost and environmentally friendly process. To develop an electrochemical etching process that does not require the use of electrolytes, we proposed a method in which a functional-group-modified electrode is used as the cathode. A carboxylated graphite electrode was prepared by treating a graphite electrode with sulfuric acid. Electrolysis of ultrapure water was carried out using the obtained electrode as a cathode. The results indicate that the electrolysis current obtained using the modified electrode is approximately six-fold that obtained using an unmodified electrode. Furthermore, we can etch a Cu surface conically in ultrapure water. The current efficiency increases by 70% at maximum, and the minimum current required for electrochemical etching decreases compared with that in the case of using an unmodified electrode. [Copyright &y& Elsevier]