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Start Over Author "Schöning, M.J." Publisher elsevier
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2. CIP (cleaning-in-place) suitable “non-glass” pH sensor based on a Ta2O5-gate EIS structure

Author

Schöning, M.J., Brinkmann, D., Rolka, D., Demuth, Caspar, Poghossian, A., Schöning, M.J., Brinkmann, D., Rolka, D., Demuth, Caspar, and Poghossian, A.

Abstract

“Non-glass” pH-sensitive capacitive EIS (electrolyte-insulator-semiconductor) sensors consisting of a Ta2O5-gate have been investigated in terms of their CIP (cleaning-in-place) suitability. After optimisation of the process parameters, even after 30 CIP cycles, the sensors show a clear pH response and nearly linear calibration curve. The video-microscopic and scanning electron microscopy investigations do not show any visible degradation or destruction of the Ta2O5 films.

Published
2018

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