13 results on '"Voelskow, M."'
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2. ION BEAM INDUCED EPITAXIAL CRYSTALLIZATION OF DOPED AMORPHOUS SILICON LAYERS
3. Epitaxial Regrowth of Amorphous or Polycrystalline Silicon Layers on Silicon Single Crystals and Bridging Epitaxy by Flash Lamp Irradiation
4. EPITAXIAL LATERAL OVERGROWTH OF AMORPHOUS CVD SILICON FILMS INDUCED BY ION IRRADIATION
5. Electrical Properties of Ion Implanted and Short Time Annealed Polycrystalline Silicon
6. OPTIMIZED SO I-PROCESS I NB BY ION BEAM SYNTHESIS OF BURIED SILICON OXYNITRIDE IN SILICON
7. Flash Lamp Annealing of Arsenic Implanted Silicon
8. Pulsed Incoherent Light Annealing of Arsenic and Phosphorus Implanted Polycrystalline Silicon
9. In situ RECRYSTALLIZATION OF IMPLANTED Si IN A HIGH-VOLTAGE ELECTRON MICROSCOPE
10. Annealing Characteristics of SiO2 -Si Structures after Incoherent Light Pulse Processing
11. Dopant Redistribution after Flash Lamp Annealing
12. Low-Energy Implantation of Arsenic in Silicon
13. High-Speed Electron Beam Annealing of Arsenic and Gallium Implanted Silicon
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