1. On the reproducibility of spray-coated ZnO thin-film transistors
- Author
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Lucas Fugikawa-Santos, João P. Braga, Guilherme R. De Lima, Giovani Gozzi, and Universidade Estadual Paulista (Unesp)
- Subjects
Fabrication ,Materials science ,thin film ,02 engineering and technology ,010402 general chemistry ,01 natural sciences ,law.invention ,law ,General Materials Science ,Electronics ,Thin film ,Reproducibility ,business.industry ,Mechanical Engineering ,Transistor ,solution deposition ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,0104 chemical sciences ,Threshold voltage ,Active layer ,Mechanics of Materials ,Thin-film transistor ,Optoelectronics ,0210 nano-technology ,business ,spray pyrolysis ,semiconducting - Abstract
Made available in DSpace on 2020-12-10T20:06:07Z (GMT). No. of bitstreams: 0 Previous issue date: 2020-01-01 Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP) Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES) Recent studies have shown spray-pyrolysis is a low-cost, simple and efficient technique for deposition of metal oxide semiconductors (such as zinc oxide) as the active layer of thin-film transistors (TFTs). However, to allow the translation from laboratory scale to industry the reproducibility of such method needs to be evaluated. We present herein a representative study concerning the reproducibility and uniformity of spray-coated ZnO TFTs using several devices, from different production batches, following the same fabrication protocol. We demonstrate that it is possible to obtain transistors with high performance and reproducibility by controlling the most relevant deposition factors, corroborated by a low deviation rate (below 10%) from the characteristic TFT parameters (mobility in saturation, threshold voltage and on/off ratio), which is compatible to commonly available commercial electronic devices. Sao Paulo State Univ UNESP, Phys Dept IBILCE, BR-15054000 Sao Jose Do Rio Preto, SP, Brazil Sao Paulo State Univ UNESP, Phys Dept IGCE, Av 24A,1515, BR-13506900 Rio Claro, SP, Brazil Sao Paulo State Univ UNESP, Phys Dept IBILCE, BR-15054000 Sao Jose Do Rio Preto, SP, Brazil Sao Paulo State Univ UNESP, Phys Dept IGCE, Av 24A,1515, BR-13506900 Rio Claro, SP, Brazil FAPESP: 2019/08019-9 CAPES: 001
- Published
- 2020