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Some harsh environments contain high frequency, high amplitude mechanical vibrations. Unfortunately some very useful components, such as micro-electro-mechanical systems (MEMS) gyroscopes, can be very sensitive to these high frequency mechanical vibrations. Passive micromachined silicon low-pass filter structures (spring-mass-damper) have been demonstrated in recent years. However, the performance of these filter structures is typically limited by low damping. This is especially true if operated in low pressure environments, which is often the optimal operating environment for the attached device that requires vibration isolation. An active micromachined vibration isolator can be realized by combining a state sensor, and electrostatic actuator and feedback electronics with the passive isolator. Using this approach, a prototype active micromachined vibration isolator is realized and used to decrease the filter Q from approximately 135 to approximately 60, when evaluated in a low pressure environment. The physical size of these active isolators is suitable for use in or as packaging for sensitive electronic and MEMS devices, such as MEMS vibratory gyros.

Two simple analyses are developed to predict losses in centrifugal compressor (or pump) vaneless diffusers: (a) One-dimensional, axisymmetric friction loss and (b) sudden-expansion mixing to account for losses in the diffuser caused by wakes of separated impeller blades. It is shown that these theories may be substituted for the more complex theory of Dean and Senoo [5]. Some experimental data are included to show the validity of the friction-loss analysis. Finally, the utility of the analyses in design is demonstrated.

It is shown that work can be done on, or by, a fluid in a frictionless flow process only if the flow is unsteady. The implications of this conclusion in the analysis of fluid machinery, and provisions which must be made in analysis to account for unsteady flow, are discussed.

Experimental investigations have shown that the flow discharged from a centrifugal compressor or pump impeller into a diffuser is often unsteady and axially asymmetric. A theory based upon a simplified model is developed for this type of flow. The theory predicts a significant reversible work transfer between parts of the flow with different velocities. This effect only occurs in cases of rotating distortion patterns; stationary distortion patterns, therefore, behave differently. Theoretical results are compared to measurements and good agreement is found. The implications of the theory have been investigated by means of machine computations and are discussed herein.

Measurements have been made of the pressure recovery of straight wall, single plane divergence diffusers with inlet Mach numbers between 0.2 and choking (0.2 ≤ Mt < 1.0). In contrast to the widely held assertion in the literature, there is no “critical” inlet subsonic Mach number above which pressure recovery decreases drastically. Two aspect ratios, AS = 0.25 and 1.0, have been studied for a range of length-to-throat-width ratios L/W1 and divergence angles 2θ around the regions of peak recovery. Diffuser performance maps are given showing pressure recovery Cp as a function of diffuser geometry for fixed values of throat Mach number Mt, throat blockage B, and aspect ratio AS. Significant changes in the location and magnitude of pressure recovery do occur with variations in Mt, B, and AS. The importance to the designer of a knowledge of how diffuser performance depends upon geometric and diffuser inlet parameters is discussed.