1. Error Sources in Atomic Force Microscopy for Dimensional Measurements: Taxonomy and Modeling
- Author
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L. De Chiffre, Enrico Savio, Alessandro Voltan, Francesco Marinello, and Simone Carmignato
- Subjects
dimensional metrology ,Data processing ,atomic force microscopy ,Basis (linear algebra) ,Computer science ,business.industry ,Mechanical Engineering ,System of measurement ,Grating ,Industrial and Manufacturing Engineering ,Computer Science Applications ,Characterization (materials science) ,Convolution ,micromanufacturing ,Optics ,Control and Systems Engineering ,Dimensional metrology ,business ,Scaling ,Algorithm - Abstract
This paper aimed at identifying the error sources that occur in dimensional measurements performed using atomic force microscopy. In particular, a set of characterization techniques for errors quantification is presented. The discussion on error sources is organized in four main categories: scanning system, tip-surface interaction, environment, and data processing. The discussed errors include scaling effects, squareness errors, hysteresis, creep, tip convolution, and thermal drift. A mathematical model of the measurement system is eventually described, as a reference basis for errors characterization, with an applicative example on a reference silicon grating.
- Published
- 2010
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