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The development of electronic devices, especially those that involve heterogeneous integration of materials, has led to increased challenges in addressing their thermal operational-temperature demands. The heat flow in these systems is significantly influenced or even dominated by thermal boundary resistance at interface between dissimilar materials. However, controlling and tuning heat transport across an interface and in the adjacent materials has so far drawn limited attention. In this work, we grow chemical-vapor-deposited (CVD) diamond on silicon substrates by graphoepitaxy and experimentally demonstrate tunable thermal transport across diamond membranes and diamond-silicon interfaces. We observed the highest diamond-silicon thermal boundary conductance (TBC) measured to date and increased diamond thermal conductivity due to strong grain texturing in the diamond near the interface. Additionally, non-equilibrium molecular-dynamics (NEMD) simulations and a Landauer approach are used to understand the diamond-silicon TBC. These findings pave the way for tuning or increasing thermal conductance in heterogeneously integrated electronics that involve polycrystalline materials and will impact applications including electronics thermal management and diamond growth.

As one of the basic components of phononics, thermal diodes transmit heat current asymmetrically similar to electronic rectifiers and diodes in microelectronics. Heat can be conducted through them easily in one direction while being blocked in the other direction. In this work, we report an easily-fabricated mesoscale chemical vapor deposited (CVD) diamond thermal diode without sharp temperature change driven by the gradient grain structure of CVD diamond membranes. We build a spectral model of diamond thermal conductivity with complete phonon dispersion relation to show significant thermal rectification in CVD diamond membranes. To explain the observed thermal rectification, the temperature and thermal conductivity distribution in the CVD diamond membrane are studied. Additionally, the effects of temperature bias and diamond membrane thickness are discussed, which shed light on tuning the thermal rectification in CVD diamond membranes. The conical grain structure makes CVD diamond membranes, and potentially other CVD film structures with gradient grain structure, excellent candidates for easily-fabricated mesoscale thermal diodes without a sharp temperature change.

The maximum output power of GaN-based high-electron mobility transistors is limited by high channel temperature induced by localized self-heating which degrades device performance and reliability. With generated heat fluxes within these devices reaching magnitude close to ten times of that at the sun surface, chemical vapor deposition (CVD) diamond is an attractive candidate to aid in the extraction of this heat in order to keep the operating temperatures of these high power electronics as low as possible. Due to the observed inhomogeneous structure, CVD diamond membranes exhibit a 3D anisotropic thermal conductivity which may result in significantly different cooling performance from expected in a given application. In this work, time domain thermoreflectance (TDTR) is used to measure the thermal properties of an 11.8-{\mu}m CVD diamond membrane from its nucleation side. Starting with a spot size diameter larger than the thickness of the membrane, measurements are made at various modulation frequencies from 1.2 MHz to 11.6 MHz to tune the heat penetration depth, and subsequently the part of diamond sampled by TDTR. We divide the membrane into ten sublayers and assume isotropic thermal conductivity in each sublayer. From this, we observe a 2D gradient of the depth-dependent thermal conductivity for this membrane. By measuring the same region with a smaller spot size at multiple frequencies, the in-plane and cross-plane thermal conductivity are extracted respectively. Through this use of multiple spot sizes and modulation frequencies, the 3D anisotropic thermal conductivity of CVD diamond membrane is experimentally obtained by fitting the experimental data to a thermal model. This work provides insight toward an improved understanding of heat conduction inhomogeneity in CVD polycrystalline diamond membrane that is important for applications of thermal management of high power electronics.