Search

High quality micro- and nano-mechanical resonators are widely used in sensing, communications and timing, and have future applications in quantum technologies and fundamental studies of quantum physics. Crystalline thin-films are particularly attractive for such resonators due to their prospects for high quality, intrinsic stress and yield strength, and low dissipation. However, when grown on a silicon substrate, interfacial defects arising from lattice mismatch with the substrate have been postulated to introduce additional dissipation. Here, we develop a new backside etching process for single crystal silicon carbide microresonators that allows us to quantitatively verify this prediction. By engineering the geometry of the resonators and removing the defective interfacial layer, we achieve quality factors exceeding a million in silicon carbide trampoline resonators at room temperature, a factor of five higher than without the removal of the interfacial defect layer. We predict that similar devices fabricated from ultrahigh purity silicon carbide and leveraging its high yield strength, could enable room temperature quality factors as high as $6\times10^9$, Comment: 9 pages 5 figures

We demonstrate a single-mode phononic waveguide that enables robust propagation of mechanical waves. The waveguide is a highly-stressed silicon nitride membrane that supports the propagation of out-of-plane modes. In direct analogy to rectangular microwave waveguides, there exists a band of frequencies over which only the fundamental mode is allowed to propagate, while multiple modes are supported at higher frequencies. We directly image the mode profiles using optical heterodyne vibration measurement, showing good agreement with theory. In the single-mode frequency band, we show low-loss propagation ($\sim1$~dB/cm) for a $\sim5$~MHz mechanical wave. This design is well suited for phononic circuits interconnecting elements such as non-linear resonators or optomechanical devices for signal processing, sensing or quantum technologies., Comment: 6 pages, 5 figures