Author: "Namba, Keisuke" / Publisher: american vacuum society - Searchworks@Jio Institute Digital Library Search Results

Searchworks

Select search scope, currently: Articles

Catalog

books, media & more in Jio Institute collections

Articles

journal articles & other e-resources

Your search keyword '"Namba, Keisuke"' showing total 1 results

Start Over Author "Namba, Keisuke" Publisher american vacuum society

1 results on '"Namba, Keisuke"'

1. Measurements of the Cl atom concentration in radio-frequency and microwave plasmas by two-photon laser-induced fluorescence: Relation to the etching of Si

Author: Ono, Kouichi, primary, Oomori, Tatsuo, additional, Tuda, Mutumi, additional, and Namba, Keisuke, additional
Published: 1992
Full Text: View/download PDF

Catalog

Books, media, physical & digital resources

See catalog results