Author: "La Fontaine, B." / Publisher: american vacuum society - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"La Fontaine, B."' showing total 2 results

Start Over Author "La Fontaine, B." Publisher american vacuum society

2 results on '"La Fontaine, B."'

1. Predicting the thermomechanical distortion of extreme ultraviolet lithography reticles for preproduction and production exposure tools

Author: Abdo, A., primary, La Fontaine, B., additional, and Engelstad, R., additional
Published: 2003
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2. Laser plasma sources for proximity printing or projection x-ray lithography

Author: Chaker, M., primary, La Fontaine, B., additional, Côté, C. Y., additional, Kieffer, J. C., additional, Pépin, H., additional, Talon, M. H., additional, Enright, G. D., additional, and Villeneuve, D. M., additional
Published: 1992
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