Author: "Gujrathi S" / Publisher: american vacuum society - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Gujrathi S"' showing total 8 results

Start Over Author "Gujrathi S" Publisher american vacuum society

8 results on '"Gujrathi S"'

1. Oxygen incorporation and charge donor activation via subplantation during growth of indium tin oxide films

Author: Amassian, A., primary, Dudek, M., additional, Zabeida, O., additional, Gujrathi, S. C., additional, Klemberg-Sapieha, J. E., additional, and Martinu, L., additional
Published: 2009
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2. Influence of the film properties on the plasma etching dynamics of rf-sputtered indium zinc oxide layers

Author: Stafford, L., primary, Lim, W. T., additional, Pearton, S. J., additional, Chicoine, M., additional, Gujrathi, S., additional, Schiettekatte, F., additional, Park, Jae-Soung, additional, Song, Ju-Il, additional, Heo, Young-Woo, additional, Lee, Joon-Hyung, additional, Kim, Jeong-Joo, additional, and Kravchenko, I. I., additional
Published: 2007
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3. Influence of substrate bias voltage on the properties of CNx films prepared by reactive magnetron sputtering

Author: Hajek, V., primary, Rusnak, K., additional, Vlcek, J., additional, Martinu, L., additional, and Gujrathi, S. C., additional
Published: 1999
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4. Effect of in situ plasma oxidation of TiN diffusion barrier for AlSiCu/TiN/Ti metallization structure of integrated circuits

Author: Fortin, V., primary, Gujrathi, S. C., additional, Gagnon, G., additional, Gauvin, R., additional, Currie, J. F., additional, Ouellet, L., additional, and Tremblay, Y., additional
Published: 1999
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5. Plasma-deposited silicon oxide and silicon nitride films on poly(ethylene terephthalate): A multitechnique study of the interphase regions

Author: da Silva Sobrinho, A. S., primary, Schühler, N., additional, Klemberg-Sapieha, J. E., additional, Wertheimer, M. R., additional, Andrews, M., additional, and Gujrathi, S. C., additional
Published: 1998
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6. Effect of the Ti/TiN bilayer barrier and its surface treatment on the reliability of a Ti/TiN/AlSiCu/TiN contact metallization

Author: Ouellet, L., primary, Tremblay, Y., additional, Gagnon, G., additional, Caron, M., additional, Currie, J. F., additional, Gujrathi, S. C., additional, and Biberger, M., additional
Published: 1996
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7. Etching of a‐C:H films by an atomic oxygen beam

Author: Bourdon, E. B. D., primary, Raveh, A., additional, Gujrathi, S. C., additional, and Martinu, L., additional
Published: 1993
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8. Hydrogen profiling by elastic recoil detection in microcrystalline germanium thin films

Author: Godet, C., primary, Roca i Cabarrocas, P., additional, Gujrathi, S. C., additional, and Burret, P. A., additional
Published: 1992
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