Author: "Chang Hyo-Sik" / Publisher: american vacuum society - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Chang Hyo-Sik"' showing total 3 results

Start Over Author "Chang Hyo-Sik" Publisher american vacuum society

3 results on '"Chang Hyo-Sik"'

1. Investigation of tetrakis(ethylmethylamido)hafnium adsorption mechanism in initial growth of atomic layer deposited-HfO2 thin films on H-/OH-terminated Si (100) surfaces

Author: Park, Jihye, primary, Jeong, Minji, additional, Cho, Young Joon, additional, Kim, Kyung Joong, additional, Tai, Truong Ba, additional, Shin, Hyeyoung, additional, Lim, Jong Chul, additional, and Chang, Hyo Sik, additional
Published: 2023
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2. Atomic transport and stability during annealing of HfO2 and HfAlO with an ultrathin layer of SiO2 on Si(001)

Author: Chang, Hyo Sik, primary, Hwang, Hyunsang, additional, Cho, Mann-ho, additional, Kim, Hyun Kyung, additional, and Moon, Dae Won, additional
Published: 2004
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3. Ultrathin nitrided-nanolaminate (Al[sub 2]O[sub 3]/ZrO[sub 2]/Al[sub 2]O[sub 3]) for metal–oxide–semiconductor gate dielectric applications

Author: Jeon, Sanghun, primary, Yang, Hyundoek, additional, Chang, Hyo Sik, additional, Park, Dae-Gyu, additional, and Hwang, Hyunsang, additional
Published: 2002
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