1. Extension of a Microscale Indentation Fracture Model to Nanoscale Contact in Purview of Mechanical Nanofabrication Processes
- Author
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Jared N. Hann, Curtis R. Taylor, Hitomi Yamaguchi, and Raul E. Riveros
- Subjects
Stress field ,Materials science ,Abrasive machining ,Indentation ,Fracture (geology) ,Forensic engineering ,Radius ,Composite material ,Deformation (engineering) ,Nanoindentation ,Microscale chemistry - Abstract
In this work, we investigate the extension of the Lawn and Evans indentation fracture model, developed primarily for microscale contact, to nanoscale contacts. Systematic nanoindentation fracture experiments are performed on Si (100) using a sharp diamond cube corner (radius, r = 32 nm) indenter as a function of load, load cycles, contact dimension, and contact separation. Atomic force microscopy is used to image and measure contact deformation and fracture. The experimental results show that the threshold load for fracture was 290 μN, which is lower than previously reported. Adjacent indents separated by less than three times the radius of each indent were observed to interact with each other, such that second indents were consistently deeper than the first at the same loads. There was an increase in crack length for pairs of indents that were separated by equally small distances (
- Published
- 2012