1. Lifetime Stability and Microstructure Properties of Cr/B4C X-ray Reflective Multilayer Coatings
- Author
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Julien E. Rault, Evgueni Meltchakov, Franck Delmotte, Regina Soufli, Christopher C. Walton, Catherine Burcklen, Eric M. Gullikson, Jennifer Rebellato, Laboratoire Charles Fabry / Optique XUV, Laboratoire Charles Fabry (LCF), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS), Lawrence Livermore National Laboratory (LLNL), Synchrotron SOLEIL (SSOLEIL), Centre National de la Recherche Scientifique (CNRS), and Lawrence Berkeley National Laboratory [Berkeley] (LBNL)
- Subjects
Diffraction ,Materials science ,010308 nuclear & particles physics ,Chrominum ,Biomedical Engineering ,Analytical chemistry ,Soft X-rays ,Bioengineering ,General Chemistry ,Photon energy ,Condensed Matter Physics ,Microstructure ,01 natural sciences ,010309 optics ,Diffusion layer ,Boron Carbide ,Multilayers ,Electron diffraction ,Transmission electron microscopy ,0103 physical sciences ,[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ,General Materials Science ,Spectroscopy ,Layer (electronics) - Abstract
International audience; This paper demonstrates that highly reflective Cr/B 4 C multilayer interference coatings with nano-metric layer thicknesses, designed to operate in the soft X-ray photon energy range, have stable reflective performance for a period of 3 years after deposition. The microstructure and chemical composition of layers and interfaces within Cr/B 4 C multilayers is also examined, with emphasis on the B 4 Con -Cr interface where a significant diffusion layer is formed and on the oxide in the top B 4 C layer. Multiple characterization techniques (X-ray reflectivity at different photon energies, X-ray pho-toelectron spectroscopy, transmission electron microscopy, electron diffraction and X-ray diffraction) are employed and the results reveal a consistent picture of the Cr/B 4 C layer structure.
- Published
- 2019
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