1. All-wet etched high-Q optical microcavity on a silicon chip.
- Author
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Zhi, Yanyan, Liu, Li, He, Yuting, Zhang, Jiejun, Li, Jie, Zhang, Kun, Zhang, Junkai, Liu, Liling, Zhang, Shu-Xin, Yao, Jianping, and Guan, Bai-Ou
- Subjects
ETCHING techniques ,QUALITY factor ,QUANTUM electrodynamics ,PLASMA etching ,POWER density ,SILICON wafers - Abstract
Optical microcavities with high quality factors can significantly enhance the intracavity power density and have become a superior platform for studying quantum electrodynamics, nonlinearities, and sensing. Minimized and compact on-chip devices require the integration of microcavities with versatile functions that can be implemented by techniques compatible with semiconductor industries. However, the silicon dry etch technique commonly used to shape silicon wafers limits the massive production of microcavities. Here, an all-wet etching technique is proposed to fabricate on-chip microcavities with the aid of photolithography. On-chip silica microdisks with quality factors of ∼ 10 5 are demonstrated, and optical modes with quality factors up to 10
6 are also observed. The proposed technique opens an avenue for economical, easy handling, and scalable production of on-chip microcavities using foundry-based technologies. [ABSTRACT FROM AUTHOR]- Published
- 2023
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