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Focuses on a study of carbon thin films using Fourier-transformation infrared spectroscopy. Effect of the intermolecular interactions between carbon molecules in the films; Observations about vibrational modes; Discussion on the mechanism of changes of vibrational modes.

A compact microwave ion source has been developed. The magnetic field in the source is produced by a permanent magnet. The dimension of the source is 46 mm in diameter and 50 mm in height. The discharge chamber and extraction hole is 20 and 2 mm in diameter, respectively. The microwave frequency is 2.45 GHZ and the power consumption is less than 50 W. It is easy to extract a total beam current of more than 1 mA from this compact source. [ABSTRACT FROM AUTHOR]

A new PIG ion source has been developed with the cathodes made of single-crystal LaB[sub 6] and a permanent magnet. The experiment showed that the single-crystal LaB[sub 6] is better than the common multicrystal LaB[sub 6] in electron emissivity, ion bombardment resistance, and cathode lifetime. That ion source can produce a total beam current of about 1 mA at the low arc power of about 30 W. [ABSTRACT FROM AUTHOR]

A Freeman ion source for the LC-2F implanter was improved. In this source the filament is a 2-mm-diam tungsten wire covered with a LaB[sub 6] cylinder. The discharge chamber is made of antioxidation and high temperature resistant stainless steel. The source lifetime is more than 10 h in pure oxygen discharges, and no oxidation phenomenon occurs on the discharge chamber during long time operation. The source discharge and extraction characteristics are similar to those used before for BF[sub 3] and P discharge. So the source can be used in a wide range of microelectronics and material science. [ABSTRACT FROM AUTHOR]